A review: high-precision angle measurement technologies

S Wang, R Ma, F Cao, L Luo, X Li - Sensors, 2024 - mdpi.com
Angle measurement is an essential component of precision measurement and serves as a
crucial prerequisite for high-end manufacturing. It guides the implementation of precision …

An insight into optical metrology in manufacturing

Y Shimizu, LC Chen, DW Kim, X Chen… - Measurement …, 2021 - iopscience.iop.org
Optical metrology is one of the key technologies in today's manufacturing industry. In this
article, we provide an insight into optical measurement technologies for precision …

Laser interference lithography for fabrication of planar scale gratings for optical metrology

Y Shimizu - Nanomanufacturing and Metrology, 2021 - Springer
Laser interference lithography is an attractive method for the fabrication of a large-area two-
dimensional planar scale grating, which can be employed as a scale for multi-axis optical …

Optical sensors for multi-axis angle and displacement measurement using grating reflectors

Y Shimizu, H Matsukuma, W Gao - Sensors, 2019 - mdpi.com
In dimensional metrology it is necessary to carry out multi-axis angle and displacement
measurement for high-precision positioning. Although the state-of-the-art linear …

[HTML][HTML] Optical angle sensor technology based on the optical frequency comb laser

Y Shimizu, H Matsukuma, W Gao - Applied Sciences, 2020 - mdpi.com
A mode-locked femtosecond laser, which is often referred to as the optical frequency comb,
has increasing applications in various industrial fields, including production engineering, in …

Dual-comb spectroscopy resolved three-degree-of-freedom sensing

S Zhou, V Le, S **ong, Y Yang, K Ni, Q Zhou… - Photonics …, 2021 - opg.optica.org
Precise and fast determination of position and orientation, which is normally achieved by
distance and angle measurements, has broad applications in academia and industry. We …

Angle measurement based on second harmonic generation using artificial neural network

K Li, Z Zhang, J Lin, R Sato, H Matsukuma… - Nanomanufacturing and …, 2023 - Springer
This article proposed an angle measurement method based on second harmonic generation
(SHG) using an artificial neural network (ANN). The method comprises three sequential …

Advanced sensing and machine learning technologies for intelligent measurement in smart and precision manufacturing

R Sato, K Li, M Michihata, S Takahashi… - International Journal of …, 2024 - jstage.jst.go.jp
This paper provides an overview of state-of-the-art sensing and machine learning
technologies for intelligent measurement in smart and precision manufacturing. Length …

Laser autocollimation based on an optical frequency comb for absolute angular position measurement

YL Chen, Y Shimizu, J Tamada, K Nakamura… - Precision …, 2018 - Elsevier
Laser autocollimation is innovated for absolute angular position measurement based on an
optical frequency comb. The conventional laser autocollimation can only make relative …

Moirétag: Angular measurement and tracking with a passive marker

S Qiu, H Amata, W Heidrich - ACM SIGGRAPH 2023 Conference …, 2023 - dl.acm.org
Stable, low-cost, and precise visual measurement of directional information has many
applications in domains such as virtual and augmented reality, visual odometry, or industrial …