Structured light three-dimensional (3D) measurement technology is considered one of the
most reliable 3D data acquisition methods. Driven by the demand for high-precision 3D data …

Silicon wafers and transparent glass plates are major components in the semiconductor
industry. In semiconductor devices, the surface shape and optical thickness of the wafers …

The main objective of this book is to present the basic theoretical principles behind modern
fringe-pattern analysis as applied to optical metrology. In addition to this, for the …

A two-step phase-shifting method, that can demodulate open-and closed-fringed patterns
without local sign ambiguity is presented. The proposed method only requires a constant …

Quality control of micro–nano structured and freeform surfaces is becoming increasingly
important, which leads to challenging requirements in the measurement and …

To accurately obtain the phase distribution of an optical surface under test, the accurate
phase extraction algorithm is essential. To overcome the phase shift error, a random two …

The surface shape and optical thickness variation of a lithium niobate (LNB) wafer were
measured simultaneously using a wavelength-tuning interferometer with a new phase …

The problem of phase recovery in phase-shifting interferometry (PSI), when the introduced
phase-shifts are unknown, has been analyzed by existing methods through the modification …

The phase-shifting interferometry has been intensively studied for more than half a century,
and is still actively investigated and improved for more demanding precision measurement …

To determine the bidirectional transmittance distribution function (BTDF) of diffusely
transmitting materials, two new primary facilities have been developed at the Physikalisch …