[HTML][HTML] Micromachined accelerometers with sub-µg/√ Hz noise floor: a review
This paper reviews the research and development of micromachined accelerometers with a
noise floor lower than 1 µg/√ Hz. Firstly, the basic working principle of micromachined …
noise floor lower than 1 µg/√ Hz. Firstly, the basic working principle of micromachined …
[PDF][PDF] Review of micromachined optical accelerometers: from mg to sub-μg
Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of
accelerometer which combines the merits of optical measurement and Micro-Electro …
accelerometer which combines the merits of optical measurement and Micro-Electro …
2 ng/√ Hz-resolution optomechanical accelerometer employing a three-dimensional MEMS interferometer
A portable and high-resolution optomechanical accelerometer employing a deformable
grating-based micro-electro-mechanical system (MEMS) interferometer is presented in this …
grating-based micro-electro-mechanical system (MEMS) interferometer is presented in this …
Design and demonstration of an in-plane silicon-on-insulator optical MEMS Fabry–Pérot-based accelerometer integrated with channel waveguides
In this paper, we present a novel optical microelectromechanical systems (MEMS)
accelerometer sensor dedicated to space applications. An in-plane Fabry-Pérot (FP) …
accelerometer sensor dedicated to space applications. An in-plane Fabry-Pérot (FP) …
Review of sensing and actuation technologies–from optical MEMS and nanophotonics to photonic nanosystems
Entering the era of the Internet of Things (IoT) and fifth-generation (5G) mobile networks, the
demand for compact, cost-effective, and high-performance sensors and actuators is …
demand for compact, cost-effective, and high-performance sensors and actuators is …
Design, optimization, and realization of a high-performance MOEMS accelerometer from a double-device-layer SOI wafer
An ultrasensitive single-axis out-of-plane micro optical electro mechanical system (MOEMS)
accelerometer with a relatively low cross-axis sensitivity based on a designated …
accelerometer with a relatively low cross-axis sensitivity based on a designated …
[HTML][HTML] Design and modification of a high-resolution optical interferometer accelerometer
Y Yao, D Pan, J Wang, T Dong, J Guo, C Wang… - Sensors, 2021 - mdpi.com
The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of
accelerometer that combines the merits of optical measurement and Micro-Electro …
accelerometer that combines the merits of optical measurement and Micro-Electro …
[HTML][HTML] Optically read displacement detection using phase-modulated diffraction gratings with reduced zeroth-order reflections
Displacement detection using optical interferometric techniques allows for low minimum
detectable displacements which are unmatched by other displacement measurement …
detectable displacements which are unmatched by other displacement measurement …
[PDF][PDF] Inverse design and realization of an optical cavity-based displacement transducer with arbitrary responses
Optical cavity has long been critical for a variety of applications ranging from precise
measurement to spectral analysis. A number of theories and methods have been successful …
measurement to spectral analysis. A number of theories and methods have been successful …
Integrated optical displacement detection and electrostatic actuation for directional optical microphones with micromachined biomimetic diaphragms
In this paper, integration and packaging of directional biomimetic microphones using a
diffraction-based optical displacement detection method is described. The optical detection …
diffraction-based optical displacement detection method is described. The optical detection …