MEMS-based oscillators are an emerging class of highly miniaturized, batch manufacturable
timing devices that can rival the electrical performance of well-established quartz-based …

This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

This review surveys micromachined gyroscope structure and circuitry technology. The
principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS …

Resonators fabricated in heavily doped silicon have been noted to have a reduced
frequency-temperature dependence compared with lightly doped silicon. The resonant …

In the last 10 or 15 years, exciting new developments have occurred in the field of filters and
multiplexers. The two words that best explain this phenomenon are “topology” and …

Advances in micro-and nanofabrication technologies have enabled the development of
novel micro-and nanomechanical resonators which have attracted significant attention due …

This paper describes the first 32 kHz low-power MEMS-based oscillator in production. The
primary goal is to provide a small form-factor oscillator (1.5× 0.8 mm 2) for use as a crystal …

A multifunctional NiTi alloy with Invar (dimension-invariant), Elinvar (elastic modulus-
invariant) and Rinvar (resistivity-invariant) properties over the temperature range from 125 K …

In this paper, the basic concepts of the equivalent model, vibration modes, and conduction
mechanisms of MEMS resonators are described. By reviewing the existing representative …