A review on 3D micro-additive manufacturing technologies

M Vaezi, H Seitz, S Yang - The International Journal of Advanced …, 2013 - Springer
New microproducts need the utilization of a diversity of materials and have complicated
three-dimensional (3D) microstructures with high aspect ratios. To date, many …

Phase change materials in microactuators: Basics, applications and perspectives

E Wilhelm, C Richter, BE Rapp - Sensors and Actuators A: Physical, 2018 - Elsevier
During the last decades micro electro mechanical systems (MEMS) have been subject to
intensive research. In many cases active components, eg, for regulating fluid flow or …

Submicron stereolithography for the production of freely movable mechanisms by using single-photon polymerization

S Maruo, K Ikuta - Sensors and Actuators A: Physical, 2002 - Elsevier
Our group has developed an advanced micro stereolithography system by using single-
photon polymerization with an He–Cd laser of 442nm. This system takes advantage of …

Force-controllable, optically driven micromachines fabricated by single-step two-photon microstereolithography

S Maruo, K Ikuta, H Korogi - Journal of Microelectromechanical …, 2003 - ieeexplore.ieee.org
We have fabricated optically driven micromechanisms and demonstrated their motion under
optical force. All of the movable microcomponents are directly fabricated through an …

Multi-polymer microstereolithography for hybrid opto-MEMS

S Maruo, K Ikuta, T Ninagawa - Technical Digest. MEMS 2001 …, 2001 - ieeexplore.ieee.org
We have developed a novel microstereolithography method for producing a hybrid structure
using multiple photocurable polymers. This method, termed the Multi-polymer IH process …

Microstereolithography: concepts and applications

A Bertsch, P Bernhard, P Renaud - ETFA 2001. 8th International …, 2001 - ieeexplore.ieee.org
Microstereolithography is a new microfabrication process that evolved from the rapid
prototy** industry. The first developments in this technology started in 1993 and different …

Fluorescence detector, filter device and related methods

G Maltezos, JK Lee, A Scherer, E Kartalov - US Patent 8,137,626, 2012 - Google Patents
Microfluidic assay detectors and microfluidic assay detection methods are disclosed. A
microfluidic chip is coupled to a light emitting device, emission filters and excitation filters …

Polymer micro piezo valve with a small dead volume

P Shao, Z Rummler… - Journal of micromechanics …, 2003 - iopscience.iop.org
A polymer valve with a small dead volume in the range of 6 nl and a response time faster
than 1 ms is presented. The valve structure is simple and therefore easy to fabricate by …

Microstereolithography

A Bertsch, P Renaud - Three-Dimensional Microfabrication Using Two …, 2020 - Elsevier
Microstereolithography is a 3D microfabrication technology that is fundamentally different
from the techniques commonly used in cleanroom environment for the manufacturing of …

Apparatus for detecting target molecules and related methods

G Maltezos, J Witzens, A Scherer - US Patent 8,187,541, 2012 - Google Patents
An apparatus for analysis of a sample and in particular of a biological sample. The
apparatus contains a microfluidic chip with dies, adapted to be selectively activated or …