The 2012 plasma roadmap
Low-temperature plasma physics and technology are diverse and interdisciplinary fields.
The plasma parameters can span many orders of magnitude and applications are found in …
The plasma parameters can span many orders of magnitude and applications are found in …
Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect
Unequal areas of the powered and grounded electrodes in single-frequency capacitively
coupled plasmas (CCPs) are well-known to generate a DC self-bias voltage and an …
coupled plasmas (CCPs) are well-known to generate a DC self-bias voltage and an …
[ספר][B] Physics of radio-frequency plasmas
P Chabert, N Braithwaite - 2011 - books.google.com
Low-temperature radio frequency plasmas are essential in various sectors of advanced
technology, from micro-engineering to spacecraft propulsion systems and efficient sources …
technology, from micro-engineering to spacecraft propulsion systems and efficient sources …
Method of controlling the film properties of PECVD-deposited thin films
SY Choi, JM White, Q Wang, BS Park - US Patent 7,785,672, 2010 - Google Patents
Related US Application Data(74) Attorney, Agent, or Firm Shirley L. Church (63)
Continuation-in-part of application No. 10/962.936, filed on Oct. 12, 2004, which is a …
Continuation-in-part of application No. 10/962.936, filed on Oct. 12, 2004, which is a …
Plasma uniformity control by gas diffuser curvature
SY Choi, BS Park, JM White, RL Tiner - US Patent 8,074,599, 2011 - Google Patents
Embodiments of a gas distribution plate for distributing gas in a processing chamber are
provided. In one embodiment, a gas distribution assembly for a plasma processing chamber …
provided. In one embodiment, a gas distribution assembly for a plasma processing chamber …
[HTML][HTML] Electron dynamics in low pressure capacitively coupled radio frequency discharges
In low temperature plasmas, the interaction of the electrons with the electric field is an
important current research topic that is relevant for many applications. Particularly, in the low …
important current research topic that is relevant for many applications. Particularly, in the low …
Plasma processing of low-k dielectrics
This paper presents an in-depth overview of the present status and novel developments in
the field of plasma processing of low dielectric constant (low-k) materials developed for …
the field of plasma processing of low dielectric constant (low-k) materials developed for …
Enhancement of Ohmic and Stochastic Heating by Resonance Effects<? format?> in Capacitive Radio Frequency Discharges: A Theoretical Approach
In low-pressure capacitive radio frequency discharges, two mechanisms of electron heating
are domi<? format?> nant:(i) Ohmic heating due to collisions of electrons with neutrals of the …
are domi<? format?> nant:(i) Ohmic heating due to collisions of electrons with neutrals of the …
RF bus and RF return bus for plasma chamber electrode
For coupling RF power from an RF input of a plasma chamber to the interior of a plasma
chamber, an RF bus conductor is connected between the RF input and a plasma chamber …
chamber, an RF bus conductor is connected between the RF input and a plasma chamber …
Collisionless heating in capacitive discharges enhanced by dual-frequency excitation
We discuss collisionless electron heating in capacitive discharges excited by a combination
of two disparate frequencies. By develo** an analytical model, we find, contrary to …
of two disparate frequencies. By develo** an analytical model, we find, contrary to …