This paper presents an overview of techniques based on refraction for light laser beam
deflectors, including laser scanners. A new typology is proposed based on the principle of …

In this paper, a data-driven modeling method for electromagnetically actuated micromirror in
random noisy environment is proposed. In this method, the electromagnetic micromirror is …

Micromirrors based on micro-electro-mechanical systems (MEMS) technology are widely
employed in different areas, such as optical switching and medical scan imaging. As the key …

This article investigates the controller design problem for an electromagnetic torsional
micromirror with guaranteed transient performance constraint. Specifically, the developed …

Underdamped feature and hysteresis existing in electromagnetic scanning micro-mirrors
(EMSMs) often lead to oscillation and undesired positioning error of deflection angle. In this …

In this paper, a mathematical model is first established for an electromagnetic actuated
polymer composite-based MEMS hard-magnetic micromirror. The model consists of the …

The micromirror based on micro-electro-mechanical systems (MEMS) technology is widely
employed in different areas, such as scanning, imaging and optical switching. This paper …

In this paper, a nonlinear feedback control algorithm is proposed to improve the
performance of an electromagnetic actuated polymer MEMS hard-magnetic micromirror. The …

In Optical Nano and Micro Actuator Technology, leading engineers, material scientists,
chemists, physicists, laser scientists, and manufacturing specialists offer an in-depth, wide …

NiFe thin films deposited by pulse reverse (PR) electrodeposition are promising candidates
for the next generation of core magnetic material to be used in magnetic components …