Metal organic vapour phase epitaxy of GaN and lateral overgrowth

P Gibart - Reports on Progress in Physics, 2004 - iopscience.iop.org
Gallium nitride (GaN) is an extremely promising wide band gap semiconductor material for
optoelectronics and high temperature, high power electronics. Actually, GaN is probably the …

Growth of GaN free from cracks on a (111) Si substrate by selective metalorganic vapor-phase epitaxy

Y Honda, Y Kuroiwa, M Yamaguchi… - Applied Physics Letters, 2002 - pubs.aip.org
The selective metalorganic vapor-phase epitaxy of wurtzite GaN was performed on a (111)
silicon substrate using SiO 2 grid mask pattern. Within window regions of (0.2–0.5) mm×(0.2 …

Growth and properties of semi-polar GaN on a patterned silicon substrate

N Sawaki, T Hikosaka, N Koide, S Tanaka… - Journal of Crystal …, 2009 - Elsevier
Adopting anisotropy etching method, a (111) facet of Si is obtained on a Si substrate and
selective area growth (SAG) of GaN is performed with metal-organic vapor phase epitaxy on …

High-quality GaN/Si (1 1 1) epitaxial layers grown with various Al0. 3Ga0. 7N/GaN superlattices as intermediate layer by MOCVD

SH Jang, CR Lee - Journal of crystal growth, 2003 - Elsevier
We have grown and characterized GaN/Si (111) epitaxial layers having different total
thicknesses and periods of Al0. 3Ga0. 7N/GaN superlattices using metalorganic chemical …

Optical and electrical properties of grown on a 7° off-axis (001)Si substrate

T Hikosaka, T Narita, Y Honda, M Yamaguchi… - Applied physics …, 2004 - pubs.aip.org
Uniform growth of (1-101) GaN was performed on coalesced stripes of GaN which had been
prepared by selective metalorganic vapor phase epitaxy on a 7° off-axis (001) Si substrate …

Nanoheteroepitaxy for the integration of highly mismatched semiconductor materials

SD Hersee, D Zubia, X Sun… - IEEE journal of …, 2002 - ieeexplore.ieee.org
We describe an ongoing study of nanoheteroepitaxy (NHE), the use of nanoscale growth-
initiation areas for the integration of highly mismatched semiconductor materials. The …

High-quality {20-21} GaN layers on patterned sapphire substrate with wide-terrace

N Okada, H Oshita, K Yamane, K Tadatomo - Applied Physics Letters, 2011 - pubs.aip.org
A {20-21} GaN layer was grown from a c-plane-like sapphire sidewall of a {22-43} patterned
sapphire substrate according to the epitaxial relationship between c-GaN and c-sapphire …

Large Area Epitaxial Lateral Overgrowth of Semipolar (1 1¯ 1\left(\right.\macr\left.\right) 01) GaN Stripes on Patterned Si Substrates Prepared using Maskless …

N Takeda, M Uemukai, T Tanikawa… - physica status solidi …, 2024 - Wiley Online Library
Selective area growth and epitaxial lateral overgrowth (ELOG) of semipolar (1 1¯
1\left(\right.\macr\left.\right) 01) GaN stripes are demonstrated on a trench patterned vicinal …

Nanoindentation-induced structural deformation in GaN/AlN multilayers

SR Jian, JY Juang, NC Chen, JSC Jang… - Nanoscience and …, 2010 - ingentaconnect.com
The mechanical responses of GaN/AlN multilayers grown on Si (111) substrates by using
the metalorganic vapor phase epitaxy (MOVPE) were investigated by combining the …

Direct growth of m-plane GaN with epitaxial lateral overgrowth from c-plane sidewall of a-plane sapphire

N Okada, Y Kawashima, K Tadatomo - Applied physics express, 2008 - iopscience.iop.org
The direct growth of m-plane GaN via metal–organic vapor phase epitaxy has been
demonstrated using a deep-groove-patterned a-plane sapphire substrate with a c-plane …