Focused electron beam-based 3D nanoprinting for scanning probe microscopy: A review

H Plank, R Winkler, CH Schwalb, J Hütner, JD Fowlkes… - Micromachines, 2019 - mdpi.com
Scanning probe microscopy (SPM) has become an essential surface characterization
technique in research and development. By concept, SPM performance crucially depends …

Gas-assisted focused electron beam and ion beam processing and fabrication

I Utke, P Hoffmann, J Melngailis - … of Vacuum Science & Technology B …, 2008 - pubs.aip.org
Beams of electrons and ions are now fairly routinely focused to dimensions in the nanometer
range. Since the beams can be used to locally alter material at the point where they are …

Nanoscale 3D chiral plasmonic helices with circular dichroism at visible frequencies

M Esposito, V Tasco, M Cuscuna, F Todisco… - Acs …, 2015 - ACS Publications
The nanoscaling of metamaterial structures represents a technological challenge toward
their application in the optical frequency range. In this work we demonstrate tailored chiro …

A nanoscale three-dimensional Monte Carlo simulation of electron-beam-induced depositionwith gas dynamics

DA Smith, JD Fowlkes, PD Rack - Nanotechnology, 2007 - iopscience.iop.org
A computer simulation was developed to simulate electron-beam-induced deposition
(EBID). Simulated growth produced high-aspect-ratio, nanoscale pillar structures by …

High-purity 3D nano-objects grown by focused-electron-beam induced deposition

R Córdoba, N Sharma, S Kölling, PM Koenraad… - …, 2016 - iopscience.iop.org
To increase the efficiency of current electronics, a specific challenge for the next generation
of memory, sensing and logic devices is to find suitable strategies to move from two-to three …

Three-dimensional nanohelices for chiral photonics

V Tasco, M Esposito, F Todisco, A Benedetti… - Applied Physics A, 2016 - Springer
We discuss the tailoring of linear chiroptical effects in three-dimensional plasmonic
nanohelices by means of challenging technological nanoscaling approaches, allowing the …

[HTML][HTML] Pillar Growth by Focused Electron Beam-Induced Deposition Using a Bimetallic Precursor as Model System: High-Energy Fragmentation vs. Low-Energy …

R Winkler, M Brugger-Hatzl, F Porrati, D Kuhness… - Nanomaterials, 2023 - mdpi.com
Electron-induced fragmentation of the HFeCo3 (CO) 12 precursor allows direct-write
fabrication of 3D nanostructures with metallic contents of up to> 95 at%. While microstructure …

Understanding the Kinetics and Nanoscale Morphology of Electron‐Beam‐Induced Deposition via a Three‐Dimensional Monte Carlo Simulation: The Effects of the …

DA Smith, JD Fowlkes, PD Rack - Small, 2008 - Wiley Online Library
The electron‐beam‐induced deposition of silicon oxide from tetraethyorthosilicate and
tungsten from tungsten hexafluoride is simulated via a Monte Carlo simulation. Pseudo one …

Electron beam induced deposition of silicon nanostructures from a liquid phase precursor

Y Liu, X Chen, KW Noh, SJ Dillon - Nanotechnology, 2012 - iopscience.iop.org
This work demonstrates electron beam induced deposition of silicon from a SiCl 4 liquid
precursor in a transmission electron microscope and a scanning electron microscope …

Electron beam induced deposition of iron nanostructures

G Hochleitner, HD Wanzenboeck… - Journal of Vacuum …, 2008 - pubs.aip.org
Electron beam induced deposition is among the most prospective methods for size-and
position-controllable nanofabrication of three-dimensional structures. Direct-write maskless …