This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

With the introduction of the working principle of coupled resonators, the coupled bulk
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …

Single charge nanoscale detection in ambient conditions is a current frontier in metrology
that has diverse interdisciplinary applications. Here, such single charge detection is …

We demonstrate a spin-based, all-dielectric electrometer based on an ensemble of nitrogen-
vacancy (NV−) defects in diamond. An applied electric field causes energy-level shifts …

In an array of identical resonators coupled through weak springs, a small perturbation in the
structural properties of one of the resonators strongly impacts coupled oscillations causing …

Capacitive parasitic feedthrough is an impediment that is inherent to all electrically
interfaced micron scale resonant devices, resulting in increased challenges to their …

We present a chemical sensor based on a capacitive micromachined ultrasonic transducer
(CMUT) configured as a resonant mass sensor with a chemically selective polymer coating …

This paper is motivated by the recent demonstration of a phononic frequency comb. While
previous experiments have shown the existence of a three-wave mixing pathway in a system …

As excessive exposure to airborne particulate matter (PM) results in adverse health effects,
the development of real-time PM monitoring is highly relevant. The objective of this article is …

A piezoelectrically actuated high quality factor (Q) mechanically coupled Lamé mode
resonator based on a thin-film piezoelectric-on-silicon (TPoS) platform is demonstrated. The …