Influence of homopolymer addition in templated assembly of cylindrical block copolymers

J Doise, C Bezik, M Hori, JJ de Pablo, R Gronheid - ACS nano, 2019 - ACS Publications
Templated assembly of cylindrical block copolymers provides a promising strategy for
patterning holes at the nanoscale. However, remaining challenges include the ability to …

Nanoscale phase change memory arrays patterned by block copolymer directed self-assembly

MC Tung, AI Khan, H Kwon, M Asheghi… - Novel Patterning …, 2022 - spiedigitallibrary.org
Scaling the cell size of phase change memory (PCM) is crucial for reducing reset current
and enabling energy-efficient switching. Because memory arrays have a regular pattern …

Studying the effects of chemistry and geometry on DSA hole-shrink process in three-dimensions

C Zhou, T Kurosawab, T Dazai, J Doise… - Journal of Micro …, 2018 - spiedigitallibrary.org
Acquiring three-dimensional (3-D) information becomes increasingly important for the
development of block copolymer (BCP) directed self-assembly (DSA) lithography, as two …

[PDF][PDF] Etching Block Copolymer Directed Self-Assembly Holes

MC Tung, H Qiao - 2018 - snfguide.stanford.edu
As chipmakers contemplate patterning at the 5 nm node and beyond, finding costeffective
lithography solutions for high-resolution patterning is increasingly challenging. Already …

[ЦИТАТА][C] Transmission Electron Tomography 3D Reconstruction of Directed Self-Assembly Di-Block Copolymers

G Pitner, K Okabe