Direct implicit and explicit energy-conserving particle-in-cell methods for modeling of capacitively coupled plasma devices
Achieving large-scale kinetic modeling is a crucial task for the development and optimization
of modern plasma devices. With the trend of decreasing pressure in applications, such as …
of modern plasma devices. With the trend of decreasing pressure in applications, such as …
Plasma asymmetry and electron and ion energy distribution function in capacitive discharges excited by tailored waveforms
Using a particle-in-cell simulation technique, we investigate the plasma and ionization
asymmetry, higher harmonics generation, and electron and ion energy distribution function …
asymmetry, higher harmonics generation, and electron and ion energy distribution function …
Spatial flux and energy asymmetry in a low pressure capacitively coupled plasma discharge excited by sawtooth waveform: A harmonic study
Plasma asymmetry generation in capacitively coupled plasma (CCP) discharges provides
control over vital parameters that are useful in many plasma processing applications. In this …
control over vital parameters that are useful in many plasma processing applications. In this …
[HTML][HTML] Investigating the effects of electron bounce-cyclotron resonance on plasma dynamics in capacitive discharges operated in the presence of a weak transverse …
Recently, Patil et al.[Phys. Rev. Res. 4, 013059 (2022)] have reported the existence of an
enhanced operating regime when a low-pressure (5 mTorr) capacitively coupled discharge …
enhanced operating regime when a low-pressure (5 mTorr) capacitively coupled discharge …
Scale-invariant resonance characteristics in magnetized capacitive radio frequency plasmas
Resonance mechanisms have been found to be essential for the generation of high-density
rf plasmas at low pressures, in which electrons can be continuously accelerated through …
rf plasmas at low pressures, in which electrons can be continuously accelerated through …
Accuracy of the explicit energy-conserving particle-in-cell method for under-resolved simulations of capacitively coupled plasma discharges
The traditional explicit electrostatic momentum-conserving particle-in-cell algorithm requires
strict resolution of the electron Debye length to deliver numerical stability and accuracy. The …
strict resolution of the electron Debye length to deliver numerical stability and accuracy. The …
Energy efficient F atom generation and control in CF4 capacitively coupled plasmas driven by tailored voltage waveforms
XK Wang, R Masheyeva, YX Liu… - Plasma Sources …, 2024 - iopscience.iop.org
Neutral radicals generated by electron impact dissociation of the background gas play
important roles in etching and deposition processes in low pressure capacitively coupled …
important roles in etching and deposition processes in low pressure capacitively coupled …
Influence of Very High-Frequency PECVD Hydrogen Plasma Treatment on Intrinsic Amorphous Silicon Passivation Stack: Impact on Silicon Heterojunction Solar Cell …
We have investigated the impact of post hydrogen plasma treatment (HPT) using two distinct
RF generators operating at 13.56 and 40.68 MHz on the PECVD-deposited ia-Si: H bilayer …
RF generators operating at 13.56 and 40.68 MHz on the PECVD-deposited ia-Si: H bilayer …
Fluid models calculation of Ar/CF4 radiofrequency capacitively coupled plasmas
A fluid model is used to calculate plasma density in radiofrequency capacitively coupled
plasmas (RF-CCPs), assuming geometrically symmetric Ar/CF 4. Electrodes are powered by …
plasmas (RF-CCPs), assuming geometrically symmetric Ar/CF 4. Electrodes are powered by …
[HTML][HTML] A harmonic study of electric field nonlinearity and field reversal in collisionless capacitive discharges driven by sawtooth-like waveforms
Understanding electron and ion heating phenomenon in capacitively coupled radio-
frequency plasma discharges is vital for many plasma processing applications. In this article …
frequency plasma discharges is vital for many plasma processing applications. In this article …