In the last five decades, the number of transistors on a chip has increased exponentially in
accordance with the Moore's law, and the semiconductor industry has followed this law as …

Block Copolymer Directed Self-Assembly (DSA) is a promising technique to print
contacts/vias for the 10nm technology node and beyond. By using hybrid lithography that …

Block copolymer directed self-assembly (DSA) is a promising technique to print contacts/vias
for the 10 nm technology node and beyond. By using hybrid lithography that incorporates …

In the sub-7nm technology nodes, as the mask cost for printing the dense via layers
increases dramatically with conventional lithography technique, industries are actively …

In recent years, directed self-assembly (DSA) has demonstrated tremendous potential to
reduce cost for multiple patterning with fewer masks, especially for via patterning. DSA is …

Lithography has been and will continue to be the backbone of the Integrated Circuit (IC)
industry to design reliable, smaller, faster and cheaper silicon systems. The continuous …

Major source of the geospatial information for a variety of applications including mission
critical analysis, land cover map**, etc. is the satellite based sensors facilitating different …

In ultra-scaled very-large-scale integration (VLSI), lithography has become the bottleneck in
integrated circuit (IC) fabrication. Since the conventional 193nm immersion lithography has …