Ion-beam-induced amorphization and recrystallization in silicon

L Pelaz, LA Marqués, J Barbolla - Journal of applied physics, 2004 - pubs.aip.org
Ion-beam-induced amorphization in Si has attracted significant interest since the beginning
of the use of ion implantation for the fabrication of Si devices. A number of theoretical …

Energetics of self-interstitial clusters in Si

NEB Cowern, G Mannino, PA Stolk, F Roozeboom… - Physical Review Letters, 1999 - APS
The transient supersaturation in a system undergoing Ostwald ripening is related to the
cluster formation energy E fc as a function of cluster size n. We use this relation to study the …

Finding reaction pathways and transition states: r-ARTn and d-ARTn as an efficient and versatile alternative to string approaches

A Jay, C Huet, N Salles, M Gunde… - Journal of Chemical …, 2020 - ACS Publications
Finding transition states and diffusion pathways is essential to understand the evolution of
materials and chemical reactions. Such characterization is hampered by the heavy …

Defect-impurity engineering in implanted silicon

AR Chelyadinskii, FF Komarov - Physics-Uspekhi, 2003 - iopscience.iop.org
The basic results of the studies of defect–impurity interaction in implanted silicon are
presented. Factors affecting the way in which quasichemical reactions proceed—namely …

A unified moment tensor potential for silicon, oxygen, and silica

K Zongo, H Sun, C Ouellet-Plamondon… - npj Computational …, 2024 - nature.com
Si and its oxides have been extensively explored in theoretical research due to their
technological importance. Simultaneously describing interatomic interactions within both Si …

[BOOK][B] Silicon, germanium, and their alloys: growth, defects, impurities, and nanocrystals

G Kissinger, S Pizzini - 2014 - books.google.com
Despite the vast knowledge accumulated on silicon, germanium, and their alloys, these
materials still demand research, eminently in view of the improvement of knowledge on …

Complexity of small silicon self-interstitial defects

DA Richie, J Kim, SA Barr, KRA Hazzard, R Hennig… - Physical review …, 2004 - APS
The combination of long-time, tight-binding molecular dynamics and real-time
multiresolution analysis techniques reveals the complexity of small silicon interstitial defects …

Status and open problems in modeling of as-implanted damage in silicon

G Hobler, G Otto - Materials Science in Semiconductor Processing, 2003 - Elsevier
Implantation damage plays an important role in silicon device manufacturing since, eg, it
causes transient enhanced diffusion and influences the activation of dopants. Many studies …

Self-interstitial aggregation in diamond

JP Goss, BJ Coomer, R Jones, TD Shaw, PR Briddon… - Physical Review B, 2001 - APS
First-principles methods are used to investigate the self-interstitial and its aggregates in
diamond. The experimental assignment of the spin-1 R 2 EPR center to the single interstitial …

Stability of si-interstitial defects: From point to extended defects

J Kim, F Kirchhoff, JW Wilkins, FS Khan - Physical Review Letters, 2000 - APS
Trends in the growth of extended interstitial defects are extracted from extensive tight-
binding and ab inito local density approximation simulations. With an increasing number of …