[HTML][HTML] Atomic layer deposition frequency-multiplied Fresnel zone plates for hard x-rays focusing

N Moldovan, R Divan, H Zeng, LE Ocola… - Journal of Vacuum …, 2018‏ - pubs.aip.org
The design and fabrication of Fresnel zone plates for hard x-ray focusing up to 25 keV
photon energies with better than 50 nm imaging half-pitch resolution is reported as …

Metal‐assisted chemical etching for realisation of deep silicon microstructures

S Zarei, M Zahedinejad… - Micro & Nano Letters, 2019‏ - Wiley Online Library
Metal‐assisted chemical etching process is exploited to realise deep‐etched silicon
structures. Gold as the noble metal, hydrogen peroxide and hydrofluoric acid solutions are …

Effect of a metal interlayer under Au catalyst for the preparation of microscale holes in Si substrate by metal-assisted chemical etching

T Shimizu, R Niwa, T Ito… - Japanese Journal of …, 2019‏ - iopscience.iop.org
Vertical microscale holes in Si (100) substrate were formed using a wet chemical method,
metal-assisted chemical etching (MacEtch), with patterned Au catalyst films. Three types of …

Nanofabrication and characterization of high-line-density x-ray transmission gratings

X Zhu, H Li, L Cao, S Liu, P Shi… - Journal of Micro …, 2017‏ - spiedigitallibrary.org
We report the nanofabrication and characterization of x-ray transmission gratings with a high
aspect ratio and a feature size of down to 65 nm. Two nanofabrication methods, the …

Fabrication of high aspect ratio structures in silicon independent of crystal orientation using metal assisted etching

K Booker, S Rahman, M Stocks… - … of Micromechanics and …, 2019‏ - iopscience.iop.org
Metal assisted etching is a technique which can be used to etch high aspect ratio structures
in silicon (Si) and has application in areas including solar cells, MEMS devices and the …

Nanowires fine tunable fabrication by varying the concentration ratios, the etchant and the plating spices in metal-assisted chemical etching of silicon wafer.

M Shavandi, A Massoudi, A Khanlarkhani… - Advanced Ceramics …, 2017‏ - acerp.ir
The metal-assisted chemical etching (MACE) was used to synthesis silicon nanowires. The
effect of etchant concentration, etching and chemical plating time and do** density on …

Block copolymer lithography and transferred patterns on the substrate used for SERS

DX Li, XP Qu - 2016 13th IEEE International Conference on …, 2016‏ - ieeexplore.ieee.org
The hexagonally ordered patterns by self-assembly of block copolymer with diameter and
spacing down to 23 nm and 15 nm, respectively, are capable of producing Si nanopores …