6–20 GHz 30% ScAlN lateral field-excited cross-sectional Lamé mode resonators for future mobile RF front ends

G Giribaldi, L Colombo, M Rinaldi - IEEE Transactions on …, 2023 - ieeexplore.ieee.org
This article reports on 30% scandium-doped AlN (ScAlN) lateral field-excited (LFE) cross-
sectional Lame'mode resonators (CLMRs) with unprecedented performance in the 6–20 …

Miniature LiNbO3/SiO2/Si SH-SAW Resonators With Near-Spurious-Free Response

TH Hsu, CH Tsai, SS Tung, MH Li - IEEE Electron Device …, 2023 - ieeexplore.ieee.org
In this letter, we present an investigation into the design, simulation, and characterization of
near-spurious-free shear horizontal surface acoustic wave (SH-SAW) resonators that utilize …

Near 6-GHz sezawa mode surface acoustic wave resonators using AlScN on SiC

X Du, N Sharma, Z Tang, C Leblanc… - Journal of …, 2024 - ieeexplore.ieee.org
Surface Acoustic Wave (SAW) devices featuring Aluminum Scandium Nitride (AlScN) on a
4H-Silicon Carbide (SiC) substrate, offer a unique blend of high sound velocity, low thermal …

Transversal spurious mode suppression in ultra-large-coupling SH0 acoustic resonators on YX36°-cut lithium niobate

S Stettler, LG Villanueva - Journal of Microelectromechanical …, 2023 - ieeexplore.ieee.org
This work reports on the design and fabrication of fundamental shear horizontal (SH0) mode
acoustic resonators based on a suspended lithium niobate (LNO) film at 1.04 GHz. Due to …

High-crystallinity 30% scaln enabling high figure of merit x-band microacoustic resonators for mid-band 6g

G Giribaldi, P Simeoni, L Colombo… - 2023 IEEE 36th …, 2023 - ieeexplore.ieee.org
This paper presents an experimental comparison of high-performance X-band piezoelectric
30% Sc-doped Aluminum Nitride (ScAlN) Cross-sectional Lamé Mode resonators (CLMRs) …

Large Coupling and Spurious-Free SH0 Plate Acoustic Wave Resonators Using LiNbO3 Thin Film

S Wu, Z Wu, H Qian, F Bao, G Tang… - IEEE Transactions on …, 2023 - ieeexplore.ieee.org
With the rapid development of 5G communication technology, high-performance acoustic
filters are urgently required to cope with the increasing number of frequency bands …

Monolithic integration of X-cut leaky SAWs and electrically small antennas for RF passive wireless sensors

L Colombo, J Guida, N Casilli, R Tetro… - 2023 IEEE …, 2023 - ieeexplore.ieee.org
In this work, an on-chip, bulk X-cut Lithium Niobate (LN) platform for the fabrication of
monolithical integrated radio frequency (RF) front-ends passives and sensors is presented …

Solidly mounted two-dimensional guided modes in 30% scandium aluminum nitride on sapphire

J Guida, G Giribaldi, L Colombo… - … Conference on Solid …, 2023 - ieeexplore.ieee.org
This work reports the first demonstration and dispersion analysis of guided S0 Lamb modes
in 30% scandium aluminum nitride (ScAlN) on sapphire (SoS). The fundamental Rayleigh …

X-Cut Lithium Niobate S0 Mode Resonators for 5G Applications

R Tetro, L Colombo, W Gubinelli… - 2024 IEEE 37th …, 2024 - ieeexplore.ieee.org
This work presents the design, fabrication, and testing of S 0 mode YZ30° X-Cut Lithium
Niobate Laterally Vibrating Resonators (LVRs) and degenerate Laterally Vibrating …

Focused S0 Lamb modes for gigahertz delay lines in 30% scandium aluminum nitride

J Guida, R Tetro, M Rinaldi… - 2023 IEEE International …, 2023 - ieeexplore.ieee.org
Scandium-doped aluminum nitride (ScAlN) is an emergent piezoelectric material for
acoustic wave devices, exhibiting higher electromechanical coupling \left(k_t^2\right) …