This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-
electro-mechanical systems) fabrication technologies and enabled micro devices of various …

This paper describes a comprehensive nonlinear multiphysics model based on the Euler–
Bernoulli equation that remains valid up to large displacements in the case of …

This letter presents the design, fabrication, and demonstration of a CMOS/
microelectromechanical system (MEMS) electrostatically self-excited resonator based on a …

A generalized foundry-oriented CMOS-MEMS platform well suited for integrated
micromechanical resonators alongside IC amplifiers has been developed for commercial …

Integration of electrostatically driven and capacitively transduced MEMS resonators in
commercial CMOS technologies is discussed. A figure of merit to study the performance of …

All‐electrical nano‐electromechanical or micro‐electromechanical systems (NEMS/MEMS)
with integrated sensing and actuation are essential to fulfill the functionalities of single …

This letter presents the design, fabrication, and demonstration of a CMOS–MEMS filter
based on two high-Q submicrometer-scale clamped–clamped beam resonators with …

In this paper, we summarize research activities and technological progress in the field of
current CMOS-MEMS resonators and oscillators for portable sensor node and timing …

Monolithic mass sensors for ultrasensitive mass detection in air conditions have been
fabricated using a conventional 0.35 μ m complementary metal-oxide-semiconductor …