Temperature stability study of resonant angular scanning micromirrors with electrostatic comb-drive actuators
Y Cao, P Wang, J Li, H **e - Sensors and Actuators A: Physical, 2021 - Elsevier
Resonant rotational scanning micromirrors with electrostatic comb-drive actuators are widely
used in generating structured lights for 3D sensing, but their resonant scanning stability is …
used in generating structured lights for 3D sensing, but their resonant scanning stability is …
Understanding compound effect of shear and squeeze-film dissipation in a silicon lateral micro-resonator for MEMS-based environmental monitoring applications
This paper investigates the compound effect of shear and squeeze energy dissipation
mechanisms for a silicon lateral micro-resonator with complex geometry in different …
mechanisms for a silicon lateral micro-resonator with complex geometry in different …
Dynamic Response Analysis of an Immersed Electrothermally Actuated MEMS Mirror
T Liu, T Pan, S Qin, H Zhao, H **e - Actuators, 2023 - mdpi.com
MEMS mirrors have a wide range of applications, most of which require large field-of-view
(FOV). Immersing MEMS mirrors in liquid is an effective way to improve the FOV. However …
(FOV). Immersing MEMS mirrors in liquid is an effective way to improve the FOV. However …
Editorial for the Special Issue on Gas Flows in Microsystems
The last two decades have witnessed a rapid development of microelectromechanical
systems (MEMS) involving gas microflows in various technical fields. Gas microflows can, for …
systems (MEMS) involving gas microflows in various technical fields. Gas microflows can, for …