SU-8 has become the favourite photoresist for high-aspect-ratio (HAR) and three-
dimensional (3D) lithographic patterning due to its excellent coating, planarization and …

This paper provides a detailed overview of developments in transducer materials technology
relating to their current and future applications in micro-scale devices. Recent advances in …

The fabrication process of ceramic microneedle arrays (MNAs) is presented. This includes
the manufacturing of an SU-8/Si-master, its double replication resulting in a PDMS mold for …

The negative photoresist SU-8 has found widespread use as a material in the fabrication of
microelectrical− mechanical systems (MEMS). Although SU-8 has been utilized as a …

A representative fabrication processing of SU-8 photoresist, Ultraviolet (UV) lithography is
usually composed of spin coat, soft bake, UV exposure, post exposure bake (PEB) …

The mechanical properties of SU-8 at microscale were measured under both micropillar
compression and nanoindentation on a film on a substrate. To the best of our knowledge …

We demonstrate a simple process for the fabrication of rigid plastic master molds for soft
lithography directly from (poly) dimethysiloxane devices. Plastics masters (PMs) provide a …

This paper describes the design, fabrication, and testing of microfluidic devices enabled by
electrodes embedded vertically in the side walls of SU-8 microchannels. With vertical …

Understanding how axons are guided to target locations within the brain is of fundamental
importance for neuroscience, and is a widely studied area of research. Biologists have an …

The generation and sensation of mechanical force plays a role in many dynamic biological
processes, including touch sensation. This paper presents a two-axis micro strain gauge …