Micro and nanoelectromechanical systems M/NEMS have been extensively investigated
and exploited in the past few decades for various applications and for probing fundamental …

This review surveys micromachined gyroscope structure and circuitry technology. The
principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS …

In this paper, issues related to the zero-rate output (ZRO) of a vibratory microgyroscope are
studied. Different sources of the ZRO are discussed and how the effect of each source can …

Micro/nanoelectromechanical systems (M/NEMS), especially micro/nanomechanical
resonators, provide an unprecedented platform for investigating a wide range of applications …

This paper presents a detailed model for possible vibration effects on MEMS degenerate
gyroscopes represented by vibratory ring gyroscopes. Ring gyroscopes are believed to be …

This paper analyzes potential causes of vibration-induced error in ideal MEMS tuning fork
gyroscopes. Even though MEMS gyros are known to be highly susceptible to mechanical …

This paper describes a high precision mode tuning scheme for a MEMS vibratory gyroscope
operating in the rate integrating mode (RIG). The tuning scheme minimizes both the cross …

A novel design method of a monolithic integrated interface circuit with quadrature error
correction for a microelectromechanical system (MEMS) dual-mass vibratory gyroscope is …

In this paper, a silicon bulk micromachined lateral-axis tuning-fork gyroscope (TFG) with a
decoupled comb drive and torsional sensing comb capacitors is presented. The novel …

In a vibratory microgyroscope, the synchronous demodulation of the secondary (sense)
resonator output is a critical part of the signal processing. This is because different …