Metrology for the next generation of semiconductor devices

NG Orji, M Badaroglu, BM Barnes, C Beitia… - Nature …, 2018 - nature.com
The semiconductor industry continues to produce ever smaller devices that are ever more
complex in shape and contain ever more types of materials. The ultimate sizes and …

Electron-beam spectroscopy for nanophotonics

A Polman, M Kociak, FJ García de Abajo - Nature materials, 2019 - nature.com
Progress in electron-beam spectroscopies has recently enabled the study of optical
excitations with combined space, energy and time resolution in the nanometre …

Cavity-mediated electron-photon pairs

A Feist, G Huang, G Arend, Y Yang, JW Henke… - Science, 2022 - science.org
Quantum information, communication, and sensing rely on the generation and control of
quantum correlations in complementary degrees of freedom. Free electrons coupled to …

Attosecond electron pulse trains and quantum state reconstruction in ultrafast transmission electron microscopy

KE Priebe, C Rathje, SV Yalunin, T Hohage, A Feist… - Nature …, 2017 - nature.com
Ultrafast electron and X-ray imaging and spectroscopy are the basis for an ongoing
revolution in the understanding of dynamical atomic-scale processes in matter. The …

Optical excitations with electron beams: Challenges and opportunities

FJ Garcia de Abajo, V Di Giulio - ACS photonics, 2021 - ACS Publications
Free electron beams such as those employed in electron microscopes have evolved into
powerful tools to investigate photonic nanostructures with an unrivaled combination of …

Laser phase plate for transmission electron microscopy

O Schwartz, JJ Axelrod, SL Campbell, C Turnbaugh… - Nature …, 2019 - nature.com
Transmission electron microscopy (TEM) of rapidly frozen biological specimens, or cryo-EM,
would benefit from the development of a phase plate for in-focus phase contrast imaging …

Electron ghost imaging

S Li, F Cropp, K Kabra, TJ Lane, G Wetzstein… - Physical review …, 2018 - APS
In this Letter we report a demonstration of electron ghost imaging. A digital micromirror
device directly modulates the photocathode drive laser to control the transverse distribution …

High-purity free-electron momentum states prepared by three-dimensional optical phase modulation

A Feist, SV Yalunin, S Schäfer, C Ropers - Physical Review Research, 2020 - APS
We demonstrate the quantized transfer of photon energy and transverse momentum to a
high-coherence electron beam. In an ultrafast transmission electron microscope, a three …

Electron-photon quantum state heralding using photonic integrated circuits

G Huang, NJ Engelsen, O Kfir, C Ropers… - PRX quantum, 2023 - APS
Recently, integrated photonic circuits have brought new capabilities to electron microscopy
and been used to demonstrate efficient electron phase modulation and electron-photon …

Tailored high-contrast attosecond electron pulses for coherent excitation and scattering

SV Yalunin, A Feist, C Ropers - Physical Review Research, 2021 - APS
Temporally sha** the density of electron beams using light forms the basis for a wide
range of established and emerging technologies, including free-electron lasers and …