An evident challenge ahead for the integrated circuit (IC) industry is the investigation and
development of methods to reduce the design complexity ensuing from growing process …

The technology of big data analysis and artificial intelligence deep learning has been
actively cross-combined with various fields to increase the effect of its original low single …

Thanks to the increasingly high standard of electronics, the semiconductor material science
and semiconductor manufacturing have been booming in the last few decades, with massive …

As the semiconductor manufacturing process is moving towards the 3 nm node, there is a
crucial need to reduce the edge placement error (EPE) to ensure proper functioning of the …

The conventional control systems in semiconductor manufacturing today typically depend on
humans to monitor the performance of their equipment. Not only is this method performed …

This paper addresses the quality control of the photolithography process in the
semiconductor industry. Overlay errors in the process seriously affect the wafer yield, and …

As key steps of lithography, the development of resist materials and the exploration of new
materials are important to meet market demands from the semiconductor industry. During …

This paper demonstrates a full-chip OPC correction flow based on deep-learning etch model
in a DUV litho-etch case. The flow leverages SEM metrology (eP5 fast E-beam tool, ASML …

Optical lithography is the main enabler to semiconductor manufacturing. It requires
extensive processing to perform the Resolution Enhancement Techniques (RETs) required …

Patterning, a major process in semiconductor manufacturing, aims to transfer the design
layout to the wafer. Accordingly, the" process proximity correction" method was developed to …