This paper presents a comprehensive review of the reliability issues hampering capacitive
RF MEMS switches in their development toward commercialization. Dielectric charging and …

This paper gives a new insight into the problem of the irreversible stiction of RF
microelectromechanical systems (MEMS) attributed to the dielectric charging. We present a …

After decades of improving semiconductor-device reliability, dielectric failure rates resulting
from surface-charge accumulation, dielectric breakdown, and charge injection have been …

Microelectromechanical systems (MEMS) are used in different applications such as
automotive, biomedical, aerospace and communication technologies. They create new …

The paper investigates the dependence of charging process on the dielectric charging of
radiation induced defects in Si3N4 and SiO2 dielectric films, which are used in RF-MEMS …

The paper analyze the direct relation between the dielectric polarization mechanisms and
the radio frequency microelectromechanical system capacitive switches performance. The …

In this work, we investigate the charging and reliability of interlayer dielectric materials that
are used in the fabrication process of advanced RF-MEMS switches. In particular, the charge …

Surface roughness is an important factor that influences the reliability and performance of
radio frequency microelectromechanical systems switches. The presence of surface …

A novel dual-pulse (NDP) actuation voltage has been proposed to reduce dielectric
charging in microelectromechanical system (MEMS) switches, leading to a longer switch …

This paper presents the fabrication and experimental results of capacitive MEM switches
with a carbon nanotubes (CNT) based dielectric for the first time to our knowledge. Double …