The symbiosis of the medicine and engineering has always represented a topic of maximum
interest and vital research importance in order to find new and viable solutions for …

Studiul experimental al unui sistem electromecanic de reglare a mobilitatii mecanice Page 1
Perspectives on the use of Thin Films Technologies in Precision Mechanics and …

A MEMS Capacitive Accelerometer which have symmetrical beam-mass structure with
different interconnection has been described in this paper. Design of a H-shaped beam …

The fundamental resonant frequencies for MEMS cantilevers of complex geometry (paddle-
shaped rectangular microbeam, homogeneous on a part of length and nonhomogeneous …

The paper gives a synthetic description of the lithography processes used to define
geometric configurations in the technology of structures with thin films for MEMS …

In this paper, a design of microstereophoto-lithography (μSPL) system by laser is proposed,
considering the key technological factors that strongly affect the system and fabrication …

In current study the improvement of the device sensitivity for an area-changed capacitive
accelerometer is presented using optimization of the device structure. The proof mass of the …

Micro-Electro-Mechanical Systems (MEMS), also known as micromechatronic devices,
integrate on the same chip (substrate) both micromechanical structures and microelectronics …

It is well known that the tribological performance of materials highly depends on the surface
topography. An experimental research to determine the friction coefficients for a few couples …

The paper deals with studying the mechanical structure of a bulk-micromachined silicon
piezoresistive accelerometer by using FEM (Finite Element Method). The vibration modes …