Recent Advanced Ultra‐Wide Bandgap β‐Ga2O3 Material and Device Technologies

S Sun, C Wang, S Alghamdi, H Zhou… - Advanced Electronic …, 2025‏ - Wiley Online Library
Abstract Gallium oxide (Ga2O3) is an emerging ultra‐wide bandgap (UWBG) semiconductor
material that has gained significant attention in the field of high voltage and high frequency …

From wide to ultrawide-bandgap semiconductors for high power and high frequency electronic devices

K Woo, Z Bian, M Noshin, RP Martinez… - Journal of Physics …, 2024‏ - iopscience.iop.org
Wide and ultrawide-bandgap (U/WBG) materials have garnered significant attention within
the semiconductor device community due to their potential to enhance device performance …

Enhancement-mode β-Ga2O3 U-shaped gate trench vertical MOSFET realized by oxygen annealing

X Zhou, Y Ma, G Xu, Q Liu, J Liu, Q He, X Zhao… - Applied Physics …, 2022‏ - pubs.aip.org
Vertical metal–oxide–semiconductor field effect transistor (MOSFET) is essential to the future
application of ultrawide bandgap β-Ga 2 O 3. In this work, we demonstrated an …

702.3 A·cm⁻²/10.4 mΩ·cm² β-Ga₂O₃ U-Shape Trench Gate MOSFET With N-Ion Implantation

Y Ma, X Zhou, W Tang, X Zhang, G Xu… - IEEE Electron …, 2023‏ - ieeexplore.ieee.org
High-performance-Ga2O3 U-shaped trench-gate metal-oxide-semiconductor field-effect
transistor (UMOSFET) has been demonstrated. Nitrogen ions implantation was employed to …

10-kV Lateral β-Ga₂O₃ MESFETs With B Ion Implanted Planar Isolation

H Liu, Y Wang, Y Lv, S Han, T Han… - IEEE Electron …, 2023‏ - ieeexplore.ieee.org
In the letter, high performance lateral-Ga 2 O 3 metal-semiconductor field effect transistors
(MESFETs) with ultra-high breakdown voltage (over 10 kV are demonstrated. Planar …

3.3 kV-class NiO/β-Ga2O3 heterojunction diode and its off-state leakage mechanism

J Wan, H Wang, C Zhang, Y Li, C Wang… - Applied Physics …, 2024‏ - pubs.aip.org
This Letter demonstrates a high-performance 3.3 kV-class β-Ga 2 O 3 vertical heterojunction
diode (HJD) along with an investigation into its off-state leakage mechanism. The vertical β …

β-Ga₂O₃ Lateral Schottky Barrier Diodes With> 10 kV Breakdown Voltage and Anode Engineering

C Wang, Q Yan, C Zhang, C Su… - IEEE Electron …, 2023‏ - ieeexplore.ieee.org
In this letter, we demonstrated-Ga2O3 lateral Schottky barrier diodes (SBDs) with
breakdown voltage (BV) over 10 kV via anode engineering techniques. Post-anode …

Demonstration of the β-Ga₂O₃ MOS-JFETs With Suppressed Gate Leakage Current and Large Gate Swing

C Wang, Q Yan, C Su, S Alghamdi… - IEEE Electron …, 2023‏ - ieeexplore.ieee.org
In this work, we have achieved novel lateral enhancement-mode (EM) and depletion-mode
(DM)-Ga2O3 metal-oxide-semiconductor junction field-effect-transistors (MOS-JFETs) …

Beta-Gallium Oxide Material and Device Technologies

M Higashiwaki, MH Wong - Annual Review of Materials …, 2024‏ - annualreviews.org
Beta-gallium oxide (β-Ga2O3) is a material with a history of research and development
spanning about 70 years; however, it has attracted little attention as a semiconductor for a …

Plasma-free dry etching of (001) β-Ga2O3 substrates by HCl gas

T Oshima, Y Oshima - Applied Physics Letters, 2023‏ - pubs.aip.org
In this study, we dry etched SiO2-masked (001) β-Ga2O3 substrates in HCl gas flow at a
high temperature without plasma excitation. The etching was done selectively in window …