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[HTML][HTML] Electrostatically actuated nanobeam-based nanoelectromechanical switches–materials solutions and operational conditions
This review summarizes relevant research in the field of electrostatically actuated nanobeam-
based nanoelectromechanical (NEM) switches. The main switch architectures and structural …
based nanoelectromechanical (NEM) switches. The main switch architectures and structural …
The strong effect on MEMS switch reliability of film deposition conditions and electrode geometry
Microelectromechanical systems (MEMS) or nanoelectromechanical systems (NEMS)
switches are of interest for applications ranging from radio frequency (RF) communication …
switches are of interest for applications ranging from radio frequency (RF) communication …
In situ oxygen plasma cleaning of microswitch surfaces—comparison of Ti and graphite electrodes
Ohmic micro-and nanoswitches are of interest for a wide variety of applications including
radio frequency communications and as low power complements to transistors. In these …
radio frequency communications and as low power complements to transistors. In these …
Optimization and contact reliability of TiN-coated microswitches in various gas environments
Titanium nitride (TiN) is of interest as a material in MEMS and NEMS switches due to its high
hardness, low-surface energy, good electrical conductivity, and resistance to chemical …
hardness, low-surface energy, good electrical conductivity, and resistance to chemical …
Contact reliability of Pt-and TiN-coated microswitches in different environments
Ohmic micro-and nanoswitches are of interest for a wide variety of applications including
phased array radars and as low power complements to transistors [1–4]. The ohmic switches …
phased array radars and as low power complements to transistors [1–4]. The ohmic switches …
[КНИГА][B] Novel Topologies for Highly-Scalable Non-Volatile NEMS Relays
JT Best - 2019 - search.proquest.com
Complementary metal oxide semiconductors (CMOS) are nearing the limits for supply
voltage and energy efficiency, motivating the search for alternative technologies. Emerging …
voltage and energy efficiency, motivating the search for alternative technologies. Emerging …
Effects of Surface Preparation, Processing, Materials and Operating Conditions on MEMS Switch Contact Reliability
C Oh - 2018 - search.proquest.com
Microelectromechanical systems (MEMS) ohmic switches are of substantial interest for a
variety of applications ranging from radio frequency (RF) communication circuitry to power …
variety of applications ranging from radio frequency (RF) communication circuitry to power …