[HTML][HTML] Electrostatically actuated nanobeam-based nanoelectromechanical switches–materials solutions and operational conditions

L Jasulaneca, J Kosmaca, R Meija… - Beilstein journal of …, 2018 - beilstein-journals.org
This review summarizes relevant research in the field of electrostatically actuated nanobeam-
based nanoelectromechanical (NEM) switches. The main switch architectures and structural …

The strong effect on MEMS switch reliability of film deposition conditions and electrode geometry

C Oh, CB Stovall, W Dhaouadi, RW Carpick… - Microelectronics …, 2019 - Elsevier
Microelectromechanical systems (MEMS) or nanoelectromechanical systems (NEMS)
switches are of interest for applications ranging from radio frequency (RF) communication …

In situ oxygen plasma cleaning of microswitch surfaces—comparison of Ti and graphite electrodes

C Oh, F Streller, WR Ashurst, RW Carpick… - Journal of …, 2016 - iopscience.iop.org
Ohmic micro-and nanoswitches are of interest for a wide variety of applications including
radio frequency communications and as low power complements to transistors. In these …

Optimization and contact reliability of TiN-coated microswitches in various gas environments

C Oh, MP de Boer - Journal of Microelectromechanical …, 2018 - ieeexplore.ieee.org
Titanium nitride (TiN) is of interest as a material in MEMS and NEMS switches due to its high
hardness, low-surface energy, good electrical conductivity, and resistance to chemical …

Contact reliability of Pt-and TiN-coated microswitches in different environments

C Oh, MP de Boer - Mechanics of Biological Systems & Micro-and …, 2019 - Springer
Ohmic micro-and nanoswitches are of interest for a wide variety of applications including
phased array radars and as low power complements to transistors [1–4]. The ohmic switches …

[КНИГА][B] Novel Topologies for Highly-Scalable Non-Volatile NEMS Relays

JT Best - 2019 - search.proquest.com
Complementary metal oxide semiconductors (CMOS) are nearing the limits for supply
voltage and energy efficiency, motivating the search for alternative technologies. Emerging …

Effects of Surface Preparation, Processing, Materials and Operating Conditions on MEMS Switch Contact Reliability

C Oh - 2018 - search.proquest.com
Microelectromechanical systems (MEMS) ohmic switches are of substantial interest for a
variety of applications ranging from radio frequency (RF) communication circuitry to power …