A novel taxonomy of built-in self-test (BIST) methods is presented for the testing of micro-
electro-mechanical systems (MEMS). With MEMS testing representing 50% of the total costs …

Modern electronics testing has a legacy of more than 40 years. The introduction of new
technologies, especially nanometer technologies with 90nm or smaller geometry, has …

High-precision miniaturized micromechanical accelerometers are used extensively in the
civilian and military fields. A novel self-test-on-chip method and time-multiplexing feedback …

In 1824 Carnot established that the efficiency of cyclic engines operating between a hot bath
at absolute temperature T hot and a bath at a lower temperature T cold cannot exceed 1− T …

This paper describes an electro-mechanical auto-calibration technique for use in capacitive
MEMS accelerometers. Auto-calibration is achieved using the combined information derived …

This paper proves that critical geometric dimensions of a capacitive resonator can be
estimated from nondestructive electrical measurements. In particular, the gap between the …

Testing and calibration constitute a major part of the overall manufacturing cost of
microelectromechanical system (MEMS) devices. A physical-stimulus-free built-in-selftest …

Piezoresistive pressure sensors have been widely used in the industry and many other
fields. However, conventional pressure sensor inspection is performed with the device off …

MEMS device degradation due to aging and other factors is becoming a major concern
because it will cause parametric deviations and catastrophic failures in the mechanical and …

In high-reliability applications, the health condition of the MEMS gyroscope needs to be
known in real time to ensure that the system does not fail due to the wrong output signal …