SiGe selective growth without a hard mask

HH Lin, LTS Lin, TL Lee, MH Yu - US Patent 7,494,884, 2009 - Google Patents
BACKGROUND The continued development of metal-oxide-semiconduc tor field-effect
transistors (MOSFET) has improved the speed, density, and cost per unit function of …

Method of forming CMOS transistor

MY Wu, CT Huang, WH Hung, SF Ting, KH Lee… - US Patent …, 2011 - Google Patents
The following presents a simplified Summary in order to provide a basic understanding of
one or more aspects of the 55 invention. This summary is not an extensive overview of the …

Method of forming stressed SOI FET having doped glass box layer using sacrificial stressed layer

D Chidambarrao, WK Henson, Y Liu - US Patent 7,888,197, 2011 - Google Patents
(57) ABSTRACT A method is provided for fabricating a semiconductor-on insulator (“SOI)
substrate. In such method an SOI substrate is formed to include (i) an SOI layer of …

FINFET structure

YL Wu, CF Chang, WJ Shen, ML Lu, CJ Liu… - US Patent …, 2016 - Google Patents
The present invention provides a FINFET structure of a non-planar MOSFET to improve
efficiency in preventing ion penetration issues and leakage current issues. In order to …

Method for improving selectivity of epi process

KY Chen, HH Lin, CF Nieh, HC Sung, CC Su… - US Patent …, 2013 - Google Patents
US8487354B2 - Method for improving selectivity of epi process - Google Patents US8487354B2
- Method for improving selectivity of epi process - Google Patents Method for improving …

Semiconductor device having carrier mobility raised by generating strain in channel region

M Shima - US Patent 8,106,467, 2012 - Google Patents
US8106467B2 - Semiconductor device having carrier mobility raised by generating strain in
channel region - Google Patents US8106467B2 - Semiconductor device having carrier mobility …

Methods of Fabricating Transistors and Structures Thereof

J Yan, H Utomo, W Li - US Patent App. 12/129,494, 2009 - Google Patents
BACKGROUND 0002 Semiconductor devices are used in a variety of elec tronic
applications, such as personal computers, cellphones, digital cameras, and other electronic …

Epitaxial silicon germanium for reduced contact resistance in field-effect transistors

L Shifren, JT Kavalieros, SM Cea, CE Weber… - US Patent …, 2010 - Google Patents
A method for selectively relieving channel stress for n-channel transistors with recessed,
epitaxial SiGe source and drain regions is described. This increases the electron mobility for …

Manufacture of semiconductor device with stress structure

N Tamura - US Patent 8,247,284, 2012 - Google Patents
US PATENT DOCUMENTS spacers;(d) etching the silicon Substrate and the sacrificial film
to form recesses in the silicon Substrate, and to change a cross sectional shape of each of …

Strained channel transistor structure with lattice-mismatched zone and fabrication method thereof

YC Yeo, CC Lin, WC Lee, C Hu - US Patent 8,062,946, 2011 - Google Patents
(57) ABSTRACT A strained-channel transistor structure with lattice-mis matched Zone and
fabrication method thereof. The transistor structure includes a Substrate having a strained …