AFM nanotribomechanical characterization of thin films for MEMS applications
Nanotribological studies of thin films are needed to develop a fundamental understanding of
the phenomena that occur to the interface surfaces that come in contact at the micro and …
the phenomena that occur to the interface surfaces that come in contact at the micro and …
Phase Engineering of Titanium Oxynitride System and Its Solar Light-Driven Photocatalytic Dye Degradation, H2 Generation, and N2 Fixation Properties
In the present work, a phase engineering strategy is explored toward forming a titanium
oxynitride (TiO x N y) phase by nitriding a sol–gel-derived TiO2-based precursor at different …
oxynitride (TiO x N y) phase by nitriding a sol–gel-derived TiO2-based precursor at different …
Microstructures and properties of titanium nitride films prepared by pulsed laser deposition at different substrate temperatures
H Guo, W Chen, Y Shan, W Wang, Z Zhang… - Applied Surface Science, 2015 - Elsevier
The nanostructured titanium nitride (TiN) films were fabricated by pulsed laser deposition
(PLD) technique at different substrate temperatures under residual vacuum, and the …
(PLD) technique at different substrate temperatures under residual vacuum, and the …
Microtribological properties of Ti6Al4V alloy treated with self-assembled dopamine and graphene oxide coatings
C Wang, G Zhang, Z Li, Y Xu, X Zeng, S Zhao… - Tribology …, 2019 - Elsevier
Tisingle bond6Alsingle bond 4V alloy is promising material as biomedical micro/nano–
electromechanical systems. However, its poor microtribological properties have a negative …
electromechanical systems. However, its poor microtribological properties have a negative …
Optimization of wear parameters and their relative effects on TiN coated surface against Ti6Al4V alloy
This study focuses the relation between the surface roughness, hardness and wear depth on
the dry sliding environment. The wear performance of the hard TiN coated surface slides …
the dry sliding environment. The wear performance of the hard TiN coated surface slides …
Tribo-mechanical properties of reactive magnetron sputtered transition metal carbide coatings
Hard and wear resistant coatings are useful to enhance the functional properties and
improve the lifetime of mechanical components. This study proposes a relationship between …
improve the lifetime of mechanical components. This study proposes a relationship between …
Multipass and reciprocating microwear study of TiN based films
Titanium nitride (TiN) coatings with a Cr metallic interlayer were deposited on AISI 316L
stainless steel substrates using DC unbalanced magnetron sputtering, changing substrate …
stainless steel substrates using DC unbalanced magnetron sputtering, changing substrate …
Effect of nitrogen flow ratio on nano-mechanical properties of tantalum nitride thin film
In this research, nanostructured tantalum nitride (TaN) thin films were deposited on 316L
stainless steel substrates by reactive magnetron sputtering. The effect of nitrogen flow ratio …
stainless steel substrates by reactive magnetron sputtering. The effect of nitrogen flow ratio …
Tribological analysis of TiN film during run-in period: An in situ investigation under controlled environment in eSEM
Most of the conventional tribological studies are performed through long duration tests,
which therefore often neglect the run-in period. To highlight these early stages of damaging …
which therefore often neglect the run-in period. To highlight these early stages of damaging …
On the mechanical properties of ultrathin titanium nitride films under different gas ratios of PVD process
YZ Lai, W Fang - Microelectronic Engineering, 2025 - Elsevier
Abstract Titanium Nitride (TiN x) thin film has numerous applications in semiconductors,
nanotechnology, and various aspects of daily life. This study presents an approach to …
nanotechnology, and various aspects of daily life. This study presents an approach to …