AFM nanotribomechanical characterization of thin films for MEMS applications

C Bîrleanu, M Pustan, F Șerdean, V Merie - Micromachines, 2021 - mdpi.com
Nanotribological studies of thin films are needed to develop a fundamental understanding of
the phenomena that occur to the interface surfaces that come in contact at the micro and …

Phase Engineering of Titanium Oxynitride System and Its Solar Light-Driven Photocatalytic Dye Degradation, H2 Generation, and N2 Fixation Properties

MP Ravikumar, TA Quach, B Urupalli… - ACS Sustainable …, 2023 - ACS Publications
In the present work, a phase engineering strategy is explored toward forming a titanium
oxynitride (TiO x N y) phase by nitriding a sol–gel-derived TiO2-based precursor at different …

Microstructures and properties of titanium nitride films prepared by pulsed laser deposition at different substrate temperatures

H Guo, W Chen, Y Shan, W Wang, Z Zhang… - Applied Surface Science, 2015 - Elsevier
The nanostructured titanium nitride (TiN) films were fabricated by pulsed laser deposition
(PLD) technique at different substrate temperatures under residual vacuum, and the …

Microtribological properties of Ti6Al4V alloy treated with self-assembled dopamine and graphene oxide coatings

C Wang, G Zhang, Z Li, Y Xu, X Zeng, S Zhao… - Tribology …, 2019 - Elsevier
Tisingle bond6Alsingle bond 4V alloy is promising material as biomedical micro/nano–
electromechanical systems. However, its poor microtribological properties have a negative …

Optimization of wear parameters and their relative effects on TiN coated surface against Ti6Al4V alloy

I Saravanan, AE Perumal, RF Issac, SC Vettivel… - Materials & Design, 2016 - Elsevier
This study focuses the relation between the surface roughness, hardness and wear depth on
the dry sliding environment. The wear performance of the hard TiN coated surface slides …

Tribo-mechanical properties of reactive magnetron sputtered transition metal carbide coatings

DD Kumar, N Kumar, S Kalaiselvam, R Radhika… - Tribology …, 2017 - Elsevier
Hard and wear resistant coatings are useful to enhance the functional properties and
improve the lifetime of mechanical components. This study proposes a relationship between …

Multipass and reciprocating microwear study of TiN based films

RC Morón, GA Rodríguez-Castro… - Surface and Coatings …, 2019 - Elsevier
Titanium nitride (TiN) coatings with a Cr metallic interlayer were deposited on AISI 316L
stainless steel substrates using DC unbalanced magnetron sputtering, changing substrate …

Effect of nitrogen flow ratio on nano-mechanical properties of tantalum nitride thin film

SS Firouzabadi, M Naderi, K Dehghani… - Journal of Alloys and …, 2017 - Elsevier
In this research, nanostructured tantalum nitride (TaN) thin films were deposited on 316L
stainless steel substrates by reactive magnetron sputtering. The effect of nitrogen flow ratio …

Tribological analysis of TiN film during run-in period: An in situ investigation under controlled environment in eSEM

A Sayilan, N Mary, D Philippon, P Steyer… - Surface and Coatings …, 2023 - Elsevier
Most of the conventional tribological studies are performed through long duration tests,
which therefore often neglect the run-in period. To highlight these early stages of damaging …

On the mechanical properties of ultrathin titanium nitride films under different gas ratios of PVD process

YZ Lai, W Fang - Microelectronic Engineering, 2025 - Elsevier
Abstract Titanium Nitride (TiN x) thin film has numerous applications in semiconductors,
nanotechnology, and various aspects of daily life. This study presents an approach to …