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Selectively nitrogen doped ALD-IGZO TFTs with extremely high mobility and reliability
DG Kim, H Choi, YS Kim, DH Lee, HJ Oh… - … Applied Materials & …, 2023 - ACS Publications
Achieving high mobility and reliability in atomic layer deposition (ALD)-based IGZO thin-film
transistors (TFTs) with an amorphous phase is vital for practical applications in relevant …
transistors (TFTs) with an amorphous phase is vital for practical applications in relevant …
Atomic Layer Deposition of WO3-Doped In2O3 for Reliable and Scalable BEOL-Compatible Transistors
Tungsten oxide (WO3) doped indium oxide (IWO) field-effect transistors (FET), synthesized
using atomic layer deposition (ALD) for three-dimensional integration and back-end-of-line …
using atomic layer deposition (ALD) for three-dimensional integration and back-end-of-line …
Epitaxial PZT film-based ferroelectric field-effect transistors for artificial synapse
Neuromorphic computing systems that mimic the human brain have recently attracted
substantial attention because they allow for the efficient processing of large amounts of data …
substantial attention because they allow for the efficient processing of large amounts of data …
A review of doped metal oxide semiconductors in the stability of thin film transistors
With the development of the times, people have higher and higher requirements for
electronic components. Thin film transistor (TFT) is an important switching device that has …
electronic components. Thin film transistor (TFT) is an important switching device that has …
Mechanism analysis of ultralow leakage and abnormal instability in InGaZnO thin-film transistor toward DRAM
G Yan, H Yang, W Liu, N Zhou, Y Hu… - … on Electron Devices, 2022 - ieeexplore.ieee.org
In this article, mechanisms of extremely low OFF-state current and abnormal negative bias
stress (NBS) are systematically investigated by the varying process that contains various gas …
stress (NBS) are systematically investigated by the varying process that contains various gas …
Self-Aligned Top-Gate Amorphous InGaZnO TFTs With Plasma Enhanced Chemical Vapor Deposited Sub-10 nm SiO2 Gate Dielectric for Low-Voltage Applications
Y Zhang, H Yang, H Peng, Y Cao… - IEEE Electron Device …, 2019 - ieeexplore.ieee.org
In this letter, self-aligned top-gate (SATG) amorphous In-Ga-Zn-O (a-IGZO) thin-film
transistors (TFTs) with an 8.62-nm SiO 2 gate dielectric grown by conventional plasma …
transistors (TFTs) with an 8.62-nm SiO 2 gate dielectric grown by conventional plasma …
High-mobility amorphous InGaZnO thin-film transistors with nitrogen introduced via low-temperature annealing
Y Yu, N Lv, D Zhang, Y Wei… - IEEE Electron Device …, 2021 - ieeexplore.ieee.org
In this letter, the carrier mobility of amorphous InGaZnO (a-IGZO) thin-film transistor (TFT)
was remarkably enhanced by the introduction of nitrogen and the formation of Zn 3 N 2, in …
was remarkably enhanced by the introduction of nitrogen and the formation of Zn 3 N 2, in …
[HTML][HTML] Analysis of nitrogen-do** effect on sub-gap density of states in a-IGZO TFTs by TCAD simulation
Z Zhu, W Cao, X Huang, Z Shi, D Zhou, W Xu - Micromachines, 2022 - mdpi.com
In this work, the impact of nitrogen do** (N-do**) on the distribution of sub-gap states in
amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs) is qualitatively analyzed by …
amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs) is qualitatively analyzed by …
Top-gate amorphous indium-gallium-zinc-oxidethin-film transistors with magnesium metallized source/drain regions
H Peng, B Chang, H Fu, H Yang… - … on Electron Devices, 2020 - ieeexplore.ieee.org
Magnesium (Mg)-induced metallization of amorphous indium-gallium-zinc-oxide (a-IGZO)
films is investigated to develop a self-aligned (SA) top-gate (SATG) a-IGZO thin-film …
films is investigated to develop a self-aligned (SA) top-gate (SATG) a-IGZO thin-film …
Effect of Back-Gate Dielectric on Indium Tin Oxide (ITO) Transistor Performance and Stability
Amorphous oxide semiconductors (AOSs) are receiving increased attention for electronics
requiring low fabrication temperatures, but concerns remain about their stability. Here, we …
requiring low fabrication temperatures, but concerns remain about their stability. Here, we …