Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …

This work studies the scheduling problem of a single-arm multicluster tool with a linear
topology and process-bound bottleneck individual tool. The objective is to find a one-wafer …

A treelike hybrid multi-cluster tool is composed of both single-arm and dual-arm cluster tools
with a treelike topology. Scheduling such a tool is challenging. For a hybrid treelike multi …

Timed Petri nets (TPNs) are useful for performance evaluation of discrete event systems due
to their mathematical formalism. This paper focuses on their use to model the preemption of …

This paper studies the challenging problem of scheduling single-arm multi-cluster tools with
wafer residency time constraints. They have a linear topology and their bottleneck tool is …

Siphons are a kind of special structural objects in a Petri net, and plays a key role in
synthesizing a live Petri net controller for flexible manufacturing systems. In order to obtain a …

Some wafer fabrication processes require a wafer to visit some processing modules in a
cluster tool multiple times, leading to a wafer revisiting process. They may pose wafer …

Manufacturing is the application of labor, tools, machines, chemical and biological
processing, to an original raw material by changing its physical and geometrical …

This paper addresses the scheduling problem of single-arm cluster tools with both wafer
residency time constraints and activity time variation in semiconductor manufacturing. Based …

Scheduling modeling for manufacturing system has always been a great challenge in both
industrial and academic community. With the growing complexity of the manufacturing …