Optical emission spectroscopy in low-temperature plasmas containing argon and nitrogen: determination of the electron temperature and density by the line-ratio …

XM Zhu, YK Pu - Journal of Physics D: Applied Physics, 2010 - iopscience.iop.org
This article reviews a variety of methods to obtain the electron temperature and density by
the emission line ratios for low-temperature plasmas containing argon or nitrogen gas …

Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect

T Lafleur - Plasma Sources Science and Technology, 2015 - iopscience.iop.org
Unequal areas of the powered and grounded electrodes in single-frequency capacitively
coupled plasmas (CCPs) are well-known to generate a DC self-bias voltage and an …

Electron dynamics in low pressure capacitively coupled radio frequency discharges

S Wilczek, J Schulze, RP Brinkmann, Z Donkó… - Journal of Applied …, 2020 - pubs.aip.org
In low temperature plasmas, the interaction of the electrons with the electric field is an
important current research topic that is relevant for many applications. Particularly, in the low …

Ionization by Drift and Ambipolar Electric Fields in Electronegative Capacitive<? format?> Radio Frequency Plasmas

J Schulze, A Derzsi, K Dittmann, T Hemke… - Physical review …, 2011 - APS
Unlike α-and γ-mode operation, electrons accelerated by strong drift and ambipolar electric
fields in the plasma bulk and at the sheath edges are found to dominate the ionization in …

Batch processing of overlap** molecular spectra as a tool for spatio-temporal diagnostics of power modulated microwave plasma jet

J Voráč, P Synek, L Potočňáková… - … sources science and …, 2017 - iopscience.iop.org
Power modulated microwave plasma jet operating in argon at atmospheric pressure was
studied by spatio-temporally resolved optical emission spectroscopy (OES) in order to clarify …

Helium metastable species generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures of He and N2

I Korolov, M Leimkühler, M Boeke… - Journal of Physics D …, 2020 - iopscience.iop.org
Spatially resolved tunable diode-laser absorption measurements of the absolute densities of
He-I (2 3 S 1) metastables in a micro atmospheric pressure plasma jet operated in He/N 2 …

Foundations of capacitive and inductive radio-frequency discharges

P Chabert, TV Tsankov… - Plasma Sources Science …, 2021 - iopscience.iop.org
This paper is the first from a set of two companion papers on radio-frequency (RF)
discharges. These two papers are in turn part of a larger series on the foundations of plasma …

The role of electron induced secondary electron emission from SiO2 surfaces in capacitively coupled radio frequency plasmas operated at low pressures

B Horváth, M Daksha, I Korolov, A Derzsi… - … Sources Science and …, 2017 - iopscience.iop.org
The effects of electron induced secondary electron (SE) emission from SiO 2 electrodes in
single-frequency capacitively coupled plasmas (CCPs) are studied by particle-in-cell/Monte …

Optical emission measurements of electron energy distributions in low-pressure argon inductively coupled plasmas

JB Boffard, RO Jung, CC Lin… - Plasma Sources Science …, 2010 - iopscience.iop.org
Optical modeling of emissions from low-temperature plasmas provides a non-invasive
technique to measure the electron energy distribution function (EEDF) of the plasma. While …

Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments

Z Donkó, J Schulze, U Czarnetzki… - Plasma Physics and …, 2012 - iopscience.iop.org
Capacitive radio frequency (RF) discharge plasmas have been serving hi-tech industry (eg
chip and solar cell manufacturing, realization of biocompatible surfaces) for several years …