Optical emission spectroscopy in low-temperature plasmas containing argon and nitrogen: determination of the electron temperature and density by the line-ratio …
XM Zhu, YK Pu - Journal of Physics D: Applied Physics, 2010 - iopscience.iop.org
This article reviews a variety of methods to obtain the electron temperature and density by
the emission line ratios for low-temperature plasmas containing argon or nitrogen gas …
the emission line ratios for low-temperature plasmas containing argon or nitrogen gas …
Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect
T Lafleur - Plasma Sources Science and Technology, 2015 - iopscience.iop.org
Unequal areas of the powered and grounded electrodes in single-frequency capacitively
coupled plasmas (CCPs) are well-known to generate a DC self-bias voltage and an …
coupled plasmas (CCPs) are well-known to generate a DC self-bias voltage and an …
Electron dynamics in low pressure capacitively coupled radio frequency discharges
In low temperature plasmas, the interaction of the electrons with the electric field is an
important current research topic that is relevant for many applications. Particularly, in the low …
important current research topic that is relevant for many applications. Particularly, in the low …
Ionization by Drift and Ambipolar Electric Fields in Electronegative Capacitive<? format?> Radio Frequency Plasmas
Unlike α-and γ-mode operation, electrons accelerated by strong drift and ambipolar electric
fields in the plasma bulk and at the sheath edges are found to dominate the ionization in …
fields in the plasma bulk and at the sheath edges are found to dominate the ionization in …
Batch processing of overlap** molecular spectra as a tool for spatio-temporal diagnostics of power modulated microwave plasma jet
Power modulated microwave plasma jet operating in argon at atmospheric pressure was
studied by spatio-temporally resolved optical emission spectroscopy (OES) in order to clarify …
studied by spatio-temporally resolved optical emission spectroscopy (OES) in order to clarify …
Helium metastable species generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures of He and N2
Spatially resolved tunable diode-laser absorption measurements of the absolute densities of
He-I (2 3 S 1) metastables in a micro atmospheric pressure plasma jet operated in He/N 2 …
He-I (2 3 S 1) metastables in a micro atmospheric pressure plasma jet operated in He/N 2 …
Foundations of capacitive and inductive radio-frequency discharges
This paper is the first from a set of two companion papers on radio-frequency (RF)
discharges. These two papers are in turn part of a larger series on the foundations of plasma …
discharges. These two papers are in turn part of a larger series on the foundations of plasma …
The role of electron induced secondary electron emission from SiO2 surfaces in capacitively coupled radio frequency plasmas operated at low pressures
The effects of electron induced secondary electron (SE) emission from SiO 2 electrodes in
single-frequency capacitively coupled plasmas (CCPs) are studied by particle-in-cell/Monte …
single-frequency capacitively coupled plasmas (CCPs) are studied by particle-in-cell/Monte …
Optical emission measurements of electron energy distributions in low-pressure argon inductively coupled plasmas
JB Boffard, RO Jung, CC Lin… - Plasma Sources Science …, 2010 - iopscience.iop.org
Optical modeling of emissions from low-temperature plasmas provides a non-invasive
technique to measure the electron energy distribution function (EEDF) of the plasma. While …
technique to measure the electron energy distribution function (EEDF) of the plasma. While …
Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments
Capacitive radio frequency (RF) discharge plasmas have been serving hi-tech industry (eg
chip and solar cell manufacturing, realization of biocompatible surfaces) for several years …
chip and solar cell manufacturing, realization of biocompatible surfaces) for several years …