Body-biased complementary logic implemented using AlN piezoelectric MEMS switches

N Sinha, TS Jones, Z Guo… - Journal of …, 2012‏ - ieeexplore.ieee.org
This paper reports on the implementation of low-voltage complementary mechanical logic
achieved by using body-biased aluminum nitride (AlN) piezoelectric microelectro …

Laterally actuated platinum-coated polysilicon NEM relays

R Parsa, WS Lee, M Shavezipur… - Journal of …, 2013‏ - ieeexplore.ieee.org
Laterally actuated polycrystalline silicon nanoelectromechanical (NEM) relays with
enhanced electrical properties are presented. Due to surface oxidation of polysilicon in room …

Characterization of contact resistance stability in MEM relays with tungsten electrodes

Y Chen, R Nathanael, J Jeon, J Yaung… - Journal of …, 2012‏ - ieeexplore.ieee.org
The impact of device operating parameters on the ON-state resistance (R ON) of
microelectromechanical relays with tungsten (W) electrodes is reported. Due to the …

Adhesive force characterization for MEM logic relays with sub-micron contacting regions

J Yaung, L Hutin, J Jeon, TJK Liu - Journal of …, 2013‏ - ieeexplore.ieee.org
Contact adhesive force (Fa) scaling is critical for relay miniaturization, since the actuation
area and/or actuation voltage must be sufficiently large to overcome the spring restoring …

Sub-100 mV computing with electro-mechanical relays

C Qian, A Peschot, B Osoba, ZA Ye… - IEEE Transactions on …, 2017‏ - ieeexplore.ieee.org
The energy efficiency of a CMOS digital logic circuit is fundamentally limited by the nonideal
switching behavior of transistors, specifically their nonzero off-state current and finite …

Development of a PZT MEMS switch architecture for low-power digital applications

RM Proie, RG Polcawich, JS Pulskamp… - Journal of …, 2011‏ - ieeexplore.ieee.org
A lead zirconate titanate (PZT) microelectromechanical systems (MEMS) digital switch was
designed as a low-power low-frequency control system intended to create energy-efficient …

[PDF][PDF] Composite polysilicon-platinum lateral nanoelectromechanical relays

R Parsa, K Akarvardar, J Provine… - … of Hilton Head …, 2010‏ - engineering.purdue.edu
This paper reports the fabrication and performance of laterally actuated, polysilicon-platinum
composite nanoelectromechanical (NEM) relays. Laterally actuated relays are defined in a …

Nano-and micro-electromechanical switch dynamics

JS Pulskamp, RM Proie… - … of Micromechanics and …, 2013‏ - iopscience.iop.org
This paper reports theoretical analysis and experimental results on the dynamics of
piezoelectric MEMS mechanical logic relays. The multiple degree of freedom analytical …

Low-power 3-bit piezoelectric MEMS analog to digital converter

R Proie, JS Pulskamp, RG Polcawich… - 2011 IEEE 24th …, 2011‏ - ieeexplore.ieee.org
This paper reports on a novel MEMS analog to digital converter (ADC) designed within a low-
power, piezoelectric MEMS based digital logic process. The 3-bit ADC achieves full …

Design and simulation of piezoelectric MEMS logic gates

P Pandiyan, Y Sujan, SS Raju - Ferroelectrics, 2023‏ - Taylor & Francis
In this article, MEMS-based logic gates such as OR, AND, NOT, NOR, and NAND gates with
functionalities similar to the electronic digital devices are designed and simulated. The key …