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Body-biased complementary logic implemented using AlN piezoelectric MEMS switches
This paper reports on the implementation of low-voltage complementary mechanical logic
achieved by using body-biased aluminum nitride (AlN) piezoelectric microelectro …
achieved by using body-biased aluminum nitride (AlN) piezoelectric microelectro …
Laterally actuated platinum-coated polysilicon NEM relays
Laterally actuated polycrystalline silicon nanoelectromechanical (NEM) relays with
enhanced electrical properties are presented. Due to surface oxidation of polysilicon in room …
enhanced electrical properties are presented. Due to surface oxidation of polysilicon in room …
Characterization of contact resistance stability in MEM relays with tungsten electrodes
The impact of device operating parameters on the ON-state resistance (R ON) of
microelectromechanical relays with tungsten (W) electrodes is reported. Due to the …
microelectromechanical relays with tungsten (W) electrodes is reported. Due to the …
Adhesive force characterization for MEM logic relays with sub-micron contacting regions
Contact adhesive force (Fa) scaling is critical for relay miniaturization, since the actuation
area and/or actuation voltage must be sufficiently large to overcome the spring restoring …
area and/or actuation voltage must be sufficiently large to overcome the spring restoring …
Sub-100 mV computing with electro-mechanical relays
The energy efficiency of a CMOS digital logic circuit is fundamentally limited by the nonideal
switching behavior of transistors, specifically their nonzero off-state current and finite …
switching behavior of transistors, specifically their nonzero off-state current and finite …
Development of a PZT MEMS switch architecture for low-power digital applications
A lead zirconate titanate (PZT) microelectromechanical systems (MEMS) digital switch was
designed as a low-power low-frequency control system intended to create energy-efficient …
designed as a low-power low-frequency control system intended to create energy-efficient …
[PDF][PDF] Composite polysilicon-platinum lateral nanoelectromechanical relays
This paper reports the fabrication and performance of laterally actuated, polysilicon-platinum
composite nanoelectromechanical (NEM) relays. Laterally actuated relays are defined in a …
composite nanoelectromechanical (NEM) relays. Laterally actuated relays are defined in a …
Nano-and micro-electromechanical switch dynamics
This paper reports theoretical analysis and experimental results on the dynamics of
piezoelectric MEMS mechanical logic relays. The multiple degree of freedom analytical …
piezoelectric MEMS mechanical logic relays. The multiple degree of freedom analytical …
Low-power 3-bit piezoelectric MEMS analog to digital converter
This paper reports on a novel MEMS analog to digital converter (ADC) designed within a low-
power, piezoelectric MEMS based digital logic process. The 3-bit ADC achieves full …
power, piezoelectric MEMS based digital logic process. The 3-bit ADC achieves full …
Design and simulation of piezoelectric MEMS logic gates
In this article, MEMS-based logic gates such as OR, AND, NOT, NOR, and NAND gates with
functionalities similar to the electronic digital devices are designed and simulated. The key …
functionalities similar to the electronic digital devices are designed and simulated. The key …