Nanopositioners are high-precision mechatronic devices that are capable of generating
mechanical motion with nanometer or sub-nanometer resolution. With this motion typically …

A design of electrostatically tunable metamaterial is proposed in the terahertz (THz)
frequency range using electric split-ring resonators (eSRR), which shows polarization …

This paper presents a force-controlled microelectromechanical systems rotary microgripper
with integrated electrothermal sensors. The proposed microgripper achieves a large …

This paper reports a microelectromechanical systems (MEMS) based XY-stage integrating
compliant motion amplification mechanism for nanopositioning at sub nanometer resolution …

We present the design and implementation of an adaptable field-programmable gate array
(FPGA)-based sensor evaluation platform. This platform is developed to benchmark a …

Linear displacement has been widely applied in the technology and applications for Industry
4.0. The Micro-electromechanical systems (MEMS) accelerometer is a potential candidate in …

PLZT (lanthanum-doped lead zirconate titanate) ceramic has obtained widespread
applications in the engineering fields. Especially, it has broad application prospects in …

This paper presents the implementation of a system to capacitively self-sense the position of
a comb drive based MEMS XY nanopositioner from a single common node. The …

We present the design and implementation of an adaptable FPGA-based sensor evaluation
platform. This platform is developed for benchmarking of an inkjet-printed capacitive position …

Three different configurations of self-sensing piezoelectric MEMS actuators are designed,
fabricated, and tested with PZT as the active material. A two-port circular diaphragm …