Physics and technology of magnetron sputtering discharges
Magnetron sputtering deposition has become the most widely used technique for deposition
of both metallic and compound thin films and is utilized in numerous industrial applications …
of both metallic and compound thin films and is utilized in numerous industrial applications …
Plasma diagnostics for understanding the plasma–surface interaction in HiPIMS discharges: a review
The physical and chemical aspects of plasma–surface interaction in high-power impulse
magnetron sputtering (HiPIMS) discharges are overviewed. The data obtained by various …
magnetron sputtering (HiPIMS) discharges are overviewed. The data obtained by various …
Quadrupole mass spectrometry of reactive plasmas
Reactive plasmas are highly valued for their ability to produce large amounts of reactive
radicals and of energetic ions bombarding surrounding surfaces. The non-equilibrium …
radicals and of energetic ions bombarding surrounding surfaces. The non-equilibrium …
High power impulse magnetron sputtering discharge
The high power impulse magnetron sputtering (HiPIMS) discharge is a recent addition to
plasma based sputtering technology. In HiPIMS, high power is applied to the magnetron …
plasma based sputtering technology. In HiPIMS, high power is applied to the magnetron …
Comparison of tribological properties of nitrided Ti-N modified layer and deposited TiN coatings on TA2 pure titanium
L Zhang, M Shao, Z Wang, Z Zhang, Y He, J Yan… - Tribology …, 2022 - Elsevier
Little work has been reported directly compared to the tribological behavior of plasma
nitrided pure titanium and those coated with TiN coatings. This work prepared the compound …
nitrided pure titanium and those coated with TiN coatings. This work prepared the compound …
[HTML][HTML] Bipolar HiPIMS for tailoring ion energies in thin film deposition
The effects of a positive pulse following a high-power impulse magnetron sputtering
(HiPIMS) pulse are studied using energy-resolved mass spectrometry. This includes …
(HiPIMS) pulse are studied using energy-resolved mass spectrometry. This includes …
[HTML][HTML] Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS
Many technologies, such as surface-acoustic-wave (SAW) resonators, sensors, and
piezoelectric MEMS require highly-oriented and textured functional thin films. The best …
piezoelectric MEMS require highly-oriented and textured functional thin films. The best …
Particle-balance models for pulsed sputtering magnetrons
The time-dependent plasma discharge ionization region model (IRM) has been under
continuous development during the past decade and used in several studies of the …
continuous development during the past decade and used in several studies of the …
Comparison of the structural properties and residual stress of AlN films deposited by dc magnetron sputtering and high power impulse magnetron sputtering at …
Aluminium nitride (AlN) films were deposited by dc magnetron sputtering (dcMS) and high
power impulse magnetron sputtering (HiPIMS) on (100) oriented silicon (Si) substrates, in Ar …
power impulse magnetron sputtering (HiPIMS) on (100) oriented silicon (Si) substrates, in Ar …
Comparison of Al–Si–N nanocomposite coatings deposited by HIPIMS and DC magnetron sputtering
This paper presents a comparative study between DC magnetron sputtering (DCMS) and
high power impulse magnetron sputtering (HIPIMS) of Al–Si–N. Coatings were synthesised …
high power impulse magnetron sputtering (HIPIMS) of Al–Si–N. Coatings were synthesised …