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A practical guide to interpreting low energy ion scattering (LEIS) spectra
S Průša, MR Linford, E Vaníčková, P Bábík… - Applied Surface …, 2024 - Elsevier
Abstract Low-Energy Ion Scattering (LEIS) spectrometry is extraordinarily sensitive and
specific to the outermost atomic layers of materials. It is a powerful tool for surface science …
specific to the outermost atomic layers of materials. It is a powerful tool for surface science …
[HTML][HTML] Ion-beam assisted synthesis and thermal oxidation of TiN thin films combined with in-situ, depth-resolved characterization using MeV ions
We present an in-situ, depth-resolved and non-destructive approach to assess the chemical
composition of titanium nitride (TiN) thin films during synthesis and controlled oxidation. Ion …
composition of titanium nitride (TiN) thin films during synthesis and controlled oxidation. Ion …
Much ado about nothing? Background anomalies without accompanying primary peaks in X‐ray photoelectron spectroscopy and low energy Ion scattering
JW Pinder, M Malatinova, M Kovařík… - Surface and …, 2025 - Wiley Online Library
ABSTRACT X‐ray photoelectron spectroscopy (XPS) and low energy ion scattering (LEIS)
are important methods for identifying and quantifying the elements at surfaces. XPS largely …
are important methods for identifying and quantifying the elements at surfaces. XPS largely …
[HTML][HTML] Examining the influence of W thickness on the Si-on-W Interface: A comparative metrology analysis
A Valpreda, JM Sturm, AE Yakshin, J Woitok… - Applied Surface …, 2024 - Elsevier
W/Si thin-film multilayer structures are used in various applications such as X-ray, neutron,
and extreme ultraviolet optics. The interfaces between the films play such a fundamental role …
and extreme ultraviolet optics. The interfaces between the films play such a fundamental role …
[HTML][HTML] Experimental electronic stop** cross section of titanium for slow hydrogen, deuterium, and helium ions
The electronic stop** cross section of Ti for light ions is measured in an energy range of
1.3–5.0 keV for H+, and 1.5–10.0 keV for He+. All measurements were performed using in …
1.3–5.0 keV for H+, and 1.5–10.0 keV for He+. All measurements were performed using in …
[PDF][PDF] Nuclear Inst. and Methods in Physics Research, B
The electronic stop** cross section of Ti for light ions is measured in an energy range of
1.3–5.0 keV for H+, and 1.5–10.0 keV for He+. All measurements were performed using in …
1.3–5.0 keV for H+, and 1.5–10.0 keV for He+. All measurements were performed using in …