MEMS-based piezoresistive and capacitive microphones: A review on materials and methods
Microelectromechanical systems (MEMS)-based piezoresistive and capacitive microphones
have gained significant attention due to their miniaturization, high performance, and diverse …
have gained significant attention due to their miniaturization, high performance, and diverse …
PDMS based electromagnetic actuator membrane with embedded magnetic particles in polymer composite
A PDMS based flexible membrane made of polymer composite with embedded NdFeB
magnetic particle has been developed using simple MEMS process. The magnetic polymer …
magnetic particle has been developed using simple MEMS process. The magnetic polymer …
The design, fabrication, and testing of an electromagnetic micropump with a matrix-patterned magnetic polymer composite actuator membrane
A valveless electromagnetic (EM) micropump with a matrix-patterned magnetic polymer
composite actuator membrane structure was successfully designed and fabricated. The …
composite actuator membrane structure was successfully designed and fabricated. The …
Modeling and simulation of non-spiral coil for magnetic sensing applications
Microcoils are essential components in magnetic sensors made using Micro-electro-
mechanical systems (MEMS) technology. Nonspiral microcoils have fabrication advantages …
mechanical systems (MEMS) technology. Nonspiral microcoils have fabrication advantages …
Influences of Dispersions' Shapes and Processing in Magnetic Field on Thermal Conductibility of PDMS–Fe3O4 Composites
Composites of magnetite (Fe3O4) nanoparticles dispersed in a polydimethylsiloxane
(PDMS) matrix were prepared by a molding process. Two types of samples were obtained …
(PDMS) matrix were prepared by a molding process. Two types of samples were obtained …
Numerical investigation of planar microcoils integrated in microfluidic devices for biological applications
A Benbrahim, H Benchenane, S Hammar… - Microsystem …, 2025 - Springer
The objective of this work is to create a finite element model of different magnetic actuator
topologies using COMSOL Multiphysics software. The aim is to simulate and improve the …
topologies using COMSOL Multiphysics software. The aim is to simulate and improve the …
A Flexible Rectangular PCB Coil to Excite Uniform Magnetic Field in Nuclear Magnetic Resonance Spectroscopy: Design, Optimization and Implementation
In this article, a rectangular coil in the form of a flexible printed circuit board (F-PCB) with
FR4 substrate is designed and fabricated. Owing to its flexibility, the coil can be curved …
FR4 substrate is designed and fabricated. Owing to its flexibility, the coil can be curved …
Significance of non-spiral planar microcoils over spiral coils for biomedical applications: Design, simulation and comparison with spiral coil
Non-spiral planar microcoil presented in this paper has a different structure and fabrication
easiness compared to conventional planar spiral coils. Non spiral coils are suitable in …
easiness compared to conventional planar spiral coils. Non spiral coils are suitable in …
Non-spiral planar microcoils for biomedical applications
Use of planar microcoils is widely accepted for various sensing and actuating applications in
diverse engineering fields. In this work, the applications of a non-spiral planar micro coil as …
diverse engineering fields. In this work, the applications of a non-spiral planar micro coil as …
Study on the influence of residual stress on the mechanical characteristics of free-standing Si-membranes processed by deep reactive ion etching
S Boominathasellarajan, P Saravanan… - Sensors and Actuators A …, 2019 - Elsevier
The mechanical behavior of free-standing Si-membranes (diaphragms) fabricated by deep
reactive ion etching (DRIE) was studied in order to emphasis the magnitude of process …
reactive ion etching (DRIE) was studied in order to emphasis the magnitude of process …