4H silicon carbide bulk acoustic wave gyroscope with ultra-high Q-factor for on-chip inertial navigation

Z Liu, Y Long, C Wehner, H Wen, F Ayazi - Communications …, 2024 - nature.com
Inertial navigation on a chip has long been constrained by the noise and stability issues of
micromechanical Coriolis gyroscopes, as silicon, the dominant material for …

An automatic phase error compensation method for MEMS quad mass gyroscope

Y Zhou, Z Ke, S Ge, S Huang, T Zhou… - IEEE Sensors …, 2024 - ieeexplore.ieee.org
This article demonstrates an automatic phase error compensation method for a micro-
electromechanical systems (MEMS) quad mass gyroscope (QMG) operating in the force-to …

0.25 deg/h closed-loop bulk acoustic wave gyroscope

DE Serrano, A Rahafrooz, R Lipka… - … on Inertial Sensors …, 2022 - ieeexplore.ieee.org
This paper reports on the design and characterization of a low-noise, wide-bandwidth, mode-
matched bulk-acoustic wave (BAW) gyroscope operating in a rotation-rate closed-loop …

Fast identification and compensation for actuation electrode errors of rate integrating gyroscopes

Y Pan, X Tang, J Li, P **ao, T **a, K Deng… - IEEE Sensors …, 2024 - ieeexplore.ieee.org
Identification and compensation methods for different sources of errors have been reported
in literature for hemispherical resonator gyroscopes (HRGs). HRGs working in the whole …

An in-run automatic mode-matching method for N= 3 MEMS disk resonator gyroscope

Y Zhou, J Ren, M Liu, T Zhou, Y Su - IEEE Sensors Journal, 2021 - ieeexplore.ieee.org
This paper demonstrates an in-run automatic mode-matching method for a Micro-Electro-
Mechanical systems (MEMS) disk resonator gyroscope (DRG) operating in the n= 3 …

A rate hemispherical resonator gyroscope with bias stability of 0.0056°/h with compensation of phase delay

X Tang, L Zeng, K Deng, J Li, P **ao, T **a… - Sensors and Actuators A …, 2024 - Elsevier
This paper demonstrated a high accuracy rate hemispherical resonator gyroscope (HRG)
with compensation of the phase delay induced by the front-end amplifier and the digital …

[HTML][HTML] Recent Progress in Robot Control Systems: Theory and Applications

C Zhang, J Wu, C Li - Symmetry, 2023 - mdpi.com
Many engineering systems, such as electronic rotors, aircraft wings, and spacecraft flywheel
structures, rely on the symmetry of their actuators. However, symmetry and asymmetry are …

Performance enhancement of piezoelectric bulk mode MEMS mode-matched gyroscopes based on a secondary phase feedback loop

CY Chang, SW Wang, SS Li - Journal of Micromechanics and …, 2023 - iopscience.iop.org
This work investigates the performance enhancement of piezoelectric bulk mode mode-
matched gyroscopes based on a secondary phase feedback loop. An independent phase …

Bridging piezoelectric and electrostatic effects: a novel piezo-MEMS pitch/roll gyroscope with sub 10°/h bias instability

Z Qi, B Wang, Z Zhai, Z Wang, X **ong… - Microsystems & …, 2024 - nature.com
This paper proposes a novel piezo-MEMS pitch/roll gyroscope that co-integrates
piezoelectric and electrostatic effects, for the first time achieves electrostatic mode-matching …

[HTML][HTML] Online asymmetry estimation for whole angle mode coriolis vibratory gyroscopes by high frequency injection

X Meng, C Li, Y Wang - Defence Technology, 2023 - Elsevier
The whole angle mode gyroscope (WAMG) is considered to be the next generation
architecture, but it is suffered from the asymmetry errors to conduct real products. This paper …