Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments
Capacitive radio frequency (RF) discharge plasmas have been serving hi-tech industry (eg
chip and solar cell manufacturing, realization of biocompatible surfaces) for several years …
chip and solar cell manufacturing, realization of biocompatible surfaces) for several years …
Electromagnetic effects in high-frequency capacitive discharges used for plasma processing
P Chabert - Journal of Physics D: Applied Physics, 2007 - iopscience.iop.org
In plasma processing, capacitive discharges have classically been operated in the
electrostatic regime, for which the excitation wavelength λ is much greater than the electrode …
electrostatic regime, for which the excitation wavelength λ is much greater than the electrode …
[KSIĄŻKA][B] Physics of radio-frequency plasmas
P Chabert, N Braithwaite - 2011 - books.google.com
Low-temperature radio frequency plasmas are essential in various sectors of advanced
technology, from micro-engineering to spacecraft propulsion systems and efficient sources …
technology, from micro-engineering to spacecraft propulsion systems and efficient sources …
Standing wave and skin effects in large-area, high-frequency capacitive discharges
Large-area capacitive discharges driven at frequencies higher than the usual industrial
frequency of 13.56 MHz have attracted recent interest for materials etching and thin film …
frequency of 13.56 MHz have attracted recent interest for materials etching and thin film …
On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric
BG Heil, U Czarnetzki, RP Brinkmann… - Journal of Physics D …, 2008 - iopscience.iop.org
A fundamental problem in technological plasmas has been how to control the ion energy
and the ion flux (plasma density) independently of one another. A simple, but previously …
and the ion flux (plasma density) independently of one another. A simple, but previously …
eduPIC: an introductory particle based code for radio-frequency plasma simulation
Particle based simulations are indispensable tools for numerical studies of charged particle
swarms and low-temperature plasma sources. The main advantage of such approaches is …
swarms and low-temperature plasma sources. The main advantage of such approaches is …
PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical asymmetry effect
Recently a novel approach for achieving separate control of ion flux and energy in
capacitively coupled radio frequency (CCRF) discharges based on the electrical asymmetry …
capacitively coupled radio frequency (CCRF) discharges based on the electrical asymmetry …
The electrical asymmetry effect in capacitively coupled radio frequency discharges–measurements of dc self bias, ion energy and ion flux
The recently theoretically predicted electrical asymmetry effect (EAE)(Heil et al 2008 IEEE
Trans. Plasma Sci. 36 1404, Heil et al 2008 J. Phys. D: Appl. Phys. 41 165202, Czarnetzki et …
Trans. Plasma Sci. 36 1404, Heil et al 2008 J. Phys. D: Appl. Phys. 41 165202, Czarnetzki et …
Strong ionization asymmetry in a geometrically symmetric radio frequency capacitively coupled plasma induced by sawtooth voltage waveforms
The ionization dynamics in geometrically symmetric parallel plate capacitively coupled
plasmas driven by radio frequency tailored voltage waveforms is investigated using phase …
plasmas driven by radio frequency tailored voltage waveforms is investigated using phase …
Frequency coupling in dual frequency capacitively coupled radio-frequency plasmas
An industrial, confined, dual frequency, capacitively coupled, radio-frequency plasma etch
reactor (Exelan®, Lam Research) has been modified for spatially resolved optical …
reactor (Exelan®, Lam Research) has been modified for spatially resolved optical …