Identification of subsurface damage of 4H-SiC wafers by combining photo-chemical etching and molten-alkali etching

W Geng, G Yang, X Zhang, X Zhang… - Journal of …, 2022 - iopscience.iop.org
In this work, we propose to reveal the subsurface damage (SSD) of 4H-SiC wafers by photo-
chemical etching and identify the nature of SSD by molten-alkali etching. Under UV …

Dominant factors and their action mechanisms on material removal rate in electrochemical mechanical polishing of 4H-SiC (0001) surface

X Yang, X Yang, K Kawai, K Arima, K Yamamura - Applied Surface Science, 2021 - Elsevier
Slurryless electrochemical mechanical polishing (ECMP) has been confirmed as a highly
efficient damage-free polishing technique for SiC wafers. To increase the material removal …

Role of the Growth Facet on the Generation and Expansion of Stacking Faults in PVT-Grown n-Type 4H-SiC Single-Crystal Boules

W Geng, Q Shao, Y Wang, R Zhu, X Han… - The Journal of …, 2023 - ACS Publications
The generation and expansion of stacking faults (SFs) during the physical-vapor-transport
(PVT) growth of n-type 4H-SiC single-crystal boules are investigated by combining …

Fabrication of high aspect ratio, non-line-of-sight vias in silicon carbide by a two-photon absorption method

JE Payne, P Nyholm, R Beazer, J Eddy… - Scientific Reports, 2024 - nature.com
The future of Moore's Law for high-performance integrated circuits (ICs) is going to be driven
more by advanced packaging and three-dimensional (3D) integration than by simply …

SiC: a photocathode for water splitting and hydrogen storage

DH Van Dorp, N Hijnen, M Di Vece… - ANGEWANDTE CHEMIE …, 2009 - air.unimi.it
Sic : a photocathode for water splitting and hydrogen storage IRIS SUrplus Home Sfoglia
Macrotipologie & tipologie Autore Titolo Riviste Serie Settore Scientifico Disciplinare Tipologia …

Nucleation of threading dislocations in 4H-SiC at early physical-vapor-transport growth stage

Q Shao, W Geng, S Xu, P Chen, X Zhang… - Crystal Growth & …, 2023 - ACS Publications
In this work, we identify the nucleation mechanism of threading dislocations (TDs)
associated with stacking faults (SFs) and 15R-SiC at the early growth stage of 4H-SiC single …

High quality SiC microdisk resonators fabricated from monolithic epilayer wafers

AP Magyar, D Bracher, JC Lee, I Aharonovich… - Applied Physics …, 2014 - pubs.aip.org
The exquisite mechanical properties of SiC have made it an important industrial material
with applications in microelectromechanical devices and high power electronics. Recently …

Dopant Selective Photoelectrochemical Etching of SiC

S Whiteley, A Sorensen, JJ Vajo, R Sfadia… - Journal of The …, 2023 - iopscience.iop.org
Single crystalline 4H-SiC is a wide-gap semiconductor with optical properties that are
poised to enable new applications in MEMS and quantum devices. A number of key hurdles …

Selective Undercut of Undoped Optical Membranes for Spin-Active Color Centers in 4H-Silicon Carbide

J Dietz, A ** monolithic 3D structures from 4H-SiC wafers
A Hochreiter, F Groß, MN Möller, M Krieger… - Scientific Reports, 2023 - nature.com
Abstract Silicon Carbide (SiC) is an outstanding material, not only for electronic applications,
but also for projected functionalities in the realm of spin-based quantum technologies, nano …