High performance piezoelectric thin films are generally lead-based, and find applications in
sensing, actuation and transduction in the realms of biology, nanometrology, acoustics and …

We report on the use of nanoindentation to characterize in situ the voltage and current
generation of piezoelectric thin films. This work presents the controlled observation of …

Piezoelectric materials perform mechanical-to-electrical energy conversion and have unique
and enhanced properties, particularly in the thin film form. In this work, the nanomechanical …

The development of next-generation piezoelectric micro-electro-mechanical systems (piezo-
MEMS) demands reliable and reproducible processes to fulfil the ever-growing …

Nanostructured piezoelectric and ferroelectric thin films are being increasingly used in
sensing and actuating microdevices. In this work, we report the experimental discovery of …

Strontium-do** of the popular lead zirconate titanate results in improved piezoelectric
response characteristics. The synthesis of these thin films at a low temperature of 300° C on …

Low temperature crystallization of complex oxide thin films has proved to be a challenge
with deposition of such materials often carried out at elevated temperatures in excess of …

We report the first instance of deposition of preferentially oriented, nanocrystalline, and
nanocolumnar strontium-doped lead zirconate titanate (PSZT) ferroelectric thin films directly …

Lead zirconate titanate Pb (Zr 1-y Tiy) O3 is a material that is known for its high piezoelectric
and ferroelectric properties. Thick and thin films of lead zirconate titanate (PZT) have been …

A self-assembly driven process to synthesize island-structured dielectric films is presented.
An intermetallic reaction in platinized silicon substrates provides preferential growth sites for …