Transversely-excited film bulk acoustic resonator with a front-side dielectric layer and optimized pitch and mark

B Garcia, J Koskela, RB Hammond, P Turner… - US Patent …, 2024 - Google Patents
Acoustic resonators and filter devices. An acoustic resonator includes a piezoelectric plate
having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, a …

Solidly-mounted transversely-excited film bulk acoustic resonator

V Yantchev, B Garcia, V Plesski, S Yandrapalli… - US Patent …, 2021 - Google Patents
Resonator devices, filter devices, and methods of fabrication are disclosed. A resonator
device includes a substrate and a single-crystal piezoelectric plate having parallel front and …

Transversely-excited film bulk acoustic resonator with multi-pitch interdigital transducer

B Garcia - US Patent 11,418,167, 2022 - Google Patents
There are disclosed acoustic resonators and methods of fabricating acoustic resonators. An
acoustic resonator includes a piezoelectric plate having front and back surfaces, the back …

Film bulk acoustic resonator fabrication method

RB Hammond, P Turner, V Yantchev - US Patent 11,984,872, 2024 - Google Patents
Methods of fabricating acoustic filters are disclosed. The back of a piezoelectric plate is
bonded to a surface of a substrate. The thickness of the piezoelectric plate is measured at a …

Transversely-excited film bulk acoustic resonator

V Plesski, S Yandrapalli, RB Hammond… - US Patent …, 2021 - Google Patents
Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a
substrate having a surface and a single-crystal piezoelectric plate having parallel front and …

Decoupled transversely-excited film bulk acoustic resonators for high power filters

S McHugh, B Garcia, V Yantchev… - US Patent App. 17 …, 2022 - Google Patents
Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a
substrate and a piezoelectric plate having front and back surfaces, the back surface attached …

Transversely-excited film bulk acoustic resonator matrix filters with switches in parallel with sub-filter shunt capacitors

A Guyette, N Fenzi, M Eddy, B Garcia - US Patent 11,476,834, 2022 - Google Patents
There are disclosed matrix filters having an input port and sub-filters connected between the
input port and respective output ports. Each of the sub-filters includes a ladder circuit with n …

Acoustic resonators and filters with reduced temperature coefficient of frequency

B Garcia - US Patent 11,356,077, 2022 - Google Patents
Acoustic resonator devices and filters. An acoustic resonator includes a substrate and a
lithium niobate plate. A back surface of the lithium niobate plate faces the substrate. A …

Resonator using YX-cut lithium niobate for high power applications

B Garcia - US Patent 11,990,888, 2024 - Google Patents
Acoustic resonator devices, filters, and methods are disclosed. An acoustic resonator
includes a substrate and a lithium niobate (LN) plate having front and back surfaces and a …

Small transversely-excited film bulk acoustic resonators with enhanced Q-factor

B Garcia - US Patent 11,368,139, 2022 - Google Patents
An acoustic resonator device includes a conductor pattern formed on a surface of a
piezoelectric plate. The conductor pattern includes a first busbar, a second busbar, and n …