The international technology roadmap of semiconductors (ITRS) is approaching the
historical end point and we observe that the semiconductor industry is driving …

The complex nano-morphology of modern soft-matter materials is successfully probed with
advanced grazing-incidence techniques. Based on grazing-incidence small-and wide-angle …

When the international technology roadmap of semiconductors (ITRS) started almost five
decades ago, the metal oxide effect transistor (MOSFET) as units in integrated circuits (IC) …

Block copolymers (BCPs) and their directed self‐assembly (DSA) has emerged as a
realizable complementary tool to aid optical patterning of device elements for future …

Block-copolymers self-assemble into diverse morphologies, where nanoscale order can be
finely tuned via block architecture and processing conditions. However, the ultimate usage …

The width and shape of 10 nm to 12 nm wide lithographically patterned SiO 2 lines were
measured in the scanning electron microscope by fitting the measured intensity vs. position …

The semiconductor industry is exploring new metrology techniques capable of meeting the
future requirement to characterize three-dimensional structure where the critical dimensions …

Nanoelectronics is changing the way the world communicates, and is transforming our daily
lives. Continuing Moore's law and miniaturization of low-power semiconductor chips with …

Methods and systems for performing measurements of semi conductor structures based on
high-brightness, polychro matic, reflective small angle x-ray scatterometry (RSAXS) …

Resonant soft X-ray scattering (R-SoXS) has proven to be a highly useful technique for
studying the morphology of soft matter thin films due to the large intrinsic contrast between …