[HTML][HTML] Porous silicon for electrical isolation in radio frequency devices: A review
The increasing expansion of telecommunication applications leads to the integration of
complete system-on-chip associating analog and digital processing units. Besides, the …
complete system-on-chip associating analog and digital processing units. Besides, the …
Dielectric properties of porous silicon for use as a substrate for the on-chip integration of millimeter-wave devices in the frequency range 140 to 210 GHz
In this work, the dielectric properties of porous Si for its use as a local substrate material for
the integration on the Si wafer of millimeter-wave devices were investigated in the frequency …
the integration on the Si wafer of millimeter-wave devices were investigated in the frequency …
Post-process porous silicon for 5G applications
The interest of 5G in centimeter and millimeter waves relies on large blocks of available
spectra and thus increased bandwidth. At these frequencies, the dielectric and conductive …
spectra and thus increased bandwidth. At these frequencies, the dielectric and conductive …
Small-and large-signal performance up to 175° C of low-cost porous silicon substrate for RF applications
This paper focuses on the comparison of the RF performances of various advanced trap-rich
(TR) siliconon-insulator (SOI) and porous silicon (PSi) substrates. The PSi substrates are …
(TR) siliconon-insulator (SOI) and porous silicon (PSi) substrates. The PSi substrates are …
Advanced Si-based substrates for RF passive integration: Comparison between local porous Si layer technology and trap-rich high resistivity Si
In this work, two novel RF substrate technologies are compared, namely local porous Si RF
substrate technology and high resistivity Si with a trap-rich layer on top (trap-rich HR-Si) …
substrate technology and high resistivity Si with a trap-rich layer on top (trap-rich HR-Si) …
Single photoresist masking for local porous Si formation
A simple process for local electrochemical porous Si formation on a Si wafer using a
photoresist mask was developed. In this respect, the AZ9260 photoresist from …
photoresist mask was developed. In this respect, the AZ9260 photoresist from …
Porous silicon/silicon hybrid substrate applied to the monolithic integration of common-mode and bandpass RF filters
M Capelle, J Billoue, P Poveda… - IEEE Transactions on …, 2015 - ieeexplore.ieee.org
In order to develop high performances and miniaturized devices for RF communications,
monolithic integration becomes an important challenge for microelectronics industries …
monolithic integration becomes an important challenge for microelectronics industries …
High quality silicon-based substrates for microwave and millimeter wave passive circuits
Porous silicon substrate is very promising for next generation wireless communication
requiring the avoidance of high-frequency losses originating from the bulk silicon. In this …
requiring the avoidance of high-frequency losses originating from the bulk silicon. In this …
Monolithic integration of low-pass filters with ESD protections on P+ silicon/porous silicon substrates
M Capelle, J Billoue, J Concord, P Poveda… - Solid-State …, 2016 - Elsevier
This work reports that silicon/porous silicon mixed substrates can be successfully used for
monolithic integration of RadioFrequency (RF) passive and active devices. To validate this …
monolithic integration of RadioFrequency (RF) passive and active devices. To validate this …
Porous Si as a substrate for the monolithic integration of RF and millimeter-wave passive devices (transmission lines, inductors, filters, and antennas): Current state-of …
The increasing need for miniaturization, reliability, and cost efficiency in modern
telecommunications has boosted the idea of system-on-chip integration, incorporating the …
telecommunications has boosted the idea of system-on-chip integration, incorporating the …