Supercritical fluids for the fabrication of semiconductor devices: emerging or missed opportunities?
AH Romang, JJ Watkins - Chemical reviews, 2010 - ACS Publications
Next generation semiconductor devices and evolving opportunities in nanoelectronics
present new challenges for fabrication technology. These include patterning and structure …
present new challenges for fabrication technology. These include patterning and structure …
Fabrication of device nanostructures using supercritical fluids
A O'Neil, JJ Watkins - MRS bulletin, 2005 - cambridge.org
Supercritical fluids including carbon dioxide offer a combination of properties that are
uniquely suited for device fabrication at the nanoscale. Liquid-like densities, favorable …
uniquely suited for device fabrication at the nanoscale. Liquid-like densities, favorable …
Enhanced Cu activity in catalytic ozonation of clofibric acid by incorporation into ammonium dawsonite
Clofibric acid (CFA) degradation by ozonation in the presence of Cu-dawsonites was
studied. Cu-dawsonite materials were synthesized via co-precipitation of Al (NO3) 3 and Cu …
studied. Cu-dawsonite materials were synthesized via co-precipitation of Al (NO3) 3 and Cu …
Nanoporous Silver with Controllable Optical Properties Formed by Chemical Dealloying in Supercritical CO2
R Morrish, AJ Muscat - Chemistry of Materials, 2009 - ACS Publications
Nanoporous Ag was formed by selectively etching Cu from multiphase AgCu alloys using
the oxidant hydrogen peroxide and the metal chelator hexafluoroacetylacetone (hfacH, 14 …
the oxidant hydrogen peroxide and the metal chelator hexafluoroacetylacetone (hfacH, 14 …
Kinetics and mechanism for the reaction of hexafluoroacetylacetone with CuO in supercritical carbon dioxide
M Durando, R Morrish, AJ Muscat - Journal of the American …, 2008 - ACS Publications
A kinetic model and mechanism were developed for the heterogeneous chelation reaction of
thin CuO films with hexafluoroacetylacetone (hfacH) in supercritical CO2. This reaction has …
thin CuO films with hexafluoroacetylacetone (hfacH) in supercritical CO2. This reaction has …
Recent advances in chemical vapor deposition
BD Fahlman - Current Organic Chemistry, 2006 - ingentaconnect.com
Chemical vapor deposition (CVD) represents the method-of-choice for thin film growth, as
well as nanomaterials such as carbon nanotubes. Distinct advantages of this technique …
well as nanomaterials such as carbon nanotubes. Distinct advantages of this technique …
Catalytic reduction of 4-nitrophenol using CuO@Na2Ti(PO4)2⋅H2O
BH Mahaulpatha, L Palliyaguru… - … Science and Health …, 2022 - Taylor & Francis
This article presents the synthesis, property characterization and catalytic application of CuO-
supported disodium titanium phosphate,(CuO@ Na2Ti (PO4) 2⋅ H2O) for the reduction of …
supported disodium titanium phosphate,(CuO@ Na2Ti (PO4) 2⋅ H2O) for the reduction of …
Study of natural convection in supercritical CO2 cold wall reactors: simulations and experiments
Fluid flow patterns and temperature profiles within cold wall, high pressure supercritical fluid
(SCF) reactors were investigated by simulation and experiment at conditions relevant to the …
(SCF) reactors were investigated by simulation and experiment at conditions relevant to the …
Cleaning Using CO2‐Based Solvents
X Zhang, B Han - CLEAN–Soil, Air, Water, 2007 - Wiley Online Library
Cleaning with hierarchy of CO2‐based solvents is advantageous from an environmental
point of view because CO2 is non‐flammable, virtually inert, and abundant. After cleaning …
point of view because CO2 is non‐flammable, virtually inert, and abundant. After cleaning …
High-performance room-temperature NO2 sensors based on microstructures self-assembled from n-type phthalocyanines: Effect of fluorine–hydrogen bonding and …
X Wang, H Wang, X Ding, X Wang, X Li, Y Chen - Organic Electronics, 2017 - Elsevier
To investigate the effect of fluorine–hydrogen bonding and metal–ligand coordination on the
morphology and gas sensing properties of self-assembled nanostructures, metal free 2, 3, 9 …
morphology and gas sensing properties of self-assembled nanostructures, metal free 2, 3, 9 …