CMOS AlN and ScAlN Pyroelectric Detectors with Optical Enhancement for Detection of CO2 and CH4 Gases
Gas sensors are useful for monitoring of greenhouse gases. As the move toward
complementary metal‐oxide‐semiconductor (CMOS) compatible pyroelectric room …
complementary metal‐oxide‐semiconductor (CMOS) compatible pyroelectric room …
Finite element simulation-based prediction of CMOS-compatible pyroelectric material in MEMS IR detectors
PB Agarwal - Microelectronics Reliability, 2023 - Elsevier
Aluminum nitride (AlN) and zinc oxide (ZnO) have immensely drawn the interest of
researchers as lead-free and CMOS-compatible materials for pyroelectric applications to …
researchers as lead-free and CMOS-compatible materials for pyroelectric applications to …
Positioning System of Infrared Sensors Based on ZnO Thin Film
CY Tsai, YW Lin, HM Ku, CY Lee - Sensors, 2023 - mdpi.com
Infrared sensors incorporating suspended zinc oxide (ZnO) pyroelectric films and thermally
insulated silicon substrates are fabricated using conventional MEMS-based thin-film …
insulated silicon substrates are fabricated using conventional MEMS-based thin-film …
Fast and Uncooled Semiconducting Ca-Doped Y-Ba-Cu-O Thin Film-Based Thermal Sensors for Infrared
YBa2Cu3O6+ x (YBCO) cuprates are semiconductive when oxygen depleted (x< 0.5). They
can be used for uncooled thermal detection in the near-infrared:(i) low temperature …
can be used for uncooled thermal detection in the near-infrared:(i) low temperature …
The Conduction Mechanism in Micron-Thick ZnO Layers Grown on Si Substrates by Spray Pyrolysis
Metal oxide films play vital roles in the electronics industry. Most current electronic devices
are based on crystalline Si substrates, and metal oxide deposition on Si wafers can result in …
are based on crystalline Si substrates, and metal oxide deposition on Si wafers can result in …
Infrared wavelength-specific gas sensing with pyroelectricity at room temperature
Pyroelectricity is a phenomenon when electricity is generated upon the detection of
temperature change. The pyroelectric effect occurs when spontaneous polarization changes …
temperature change. The pyroelectric effect occurs when spontaneous polarization changes …
SF6 mixed in N2 gas sensing responses from CMOS-compatible AlN and ScAlN pyroelectric detectors
DKT Ng, W Chen, L Xu, HJE Lau… - MOEMS and …, 2024 - spiedigitallibrary.org
SF 6 gas sensor is developed to measure SF 6 gas at different concentrations mixed with N2
based on mid-IR absorption of SF 6 at a wavelength of~ 10.6 μm. An optical bandpass filter …
based on mid-IR absorption of SF 6 at a wavelength of~ 10.6 μm. An optical bandpass filter …
An Investigation of Structural, Optical and Pyroelectrical Properties of LiTaO3
In this study, structural, optical, and pyroelectric properties of Z-cut single crystal LiTaO3 bulk
materials with thicknesses of 27 µm and 250 µm are analyzed. XRD results show …
materials with thicknesses of 27 µm and 250 µm are analyzed. XRD results show …