This paper is a report on the design and fabrication of a dual-axis micro-opto-electro-
mechanical system (MOEMS) accelerometer. The device consists of a proof mass (PM) …

This paper presents an out-of-plane (z-axis) accelerometer, which incorporates the use of
two different MEMS capacitive electrode structures in combination for implementing a linear …

This paper describes and analyzes critically an experimental methodology for the calibration
of three-axis accelerometers with reference to sinusoidal vibrations in the range up to 5 Hz …

IOP-Aivela-acceleration (2) Page 1 Journal of Physics: Conference Series PAPER • OPEN
ACCESS Identification of calibration and operating limits of a low-cost embedded system …

We present a high-performance capacitive accelerometer with a sub-µg noise limit and 1.2
kHz bandwidth for particle acceleration detection applications. The low noise of the …

In this thesis, a closed-loop analog readout circuit for capacitive MEMS accelerometers is
introduced. The detailed analysis of the dynamics of the proposed accelerometer is …

We present a high-performance capacitive accelerometer with a sub-µg noise limit and 1.2
kHz bandwidth for particle acceleration detection applications. The low noise of the …

Kapasitif sensörler başta tahıl sektörü olmak üzere gıda endüstrisinde farklı uygulamalarda
kullanılmaktadır. Bu kullanım alanları, gerçek zamanlı üretim sistemlerinde proseslerini …

This thesis presents the design, fabrication and characterization of a high performance,
integrated, resonant MEMS temperature sensor, and temperature compensation of a …