Silicon nitride and silicon nitride-rich thin film technologies: state-of-the-art processing technologies, properties, and applications

AE Kaloyeros, Y Pan, J Goff… - ECS Journal of Solid State …, 2020 - iopscience.iop.org
Accelerating interest in silicon nitride thin film material system continues in both academic
and industrial communities due to its highly desirable physical, chemical, and electrical …

Optically reconfigurable quasi-phase-matching in silicon nitride microresonators

E Nitiss, J Hu, A Stroganov, CS Brès - Nature Photonics, 2022 - nature.com
Quasi-phase-matching has long been a widely used approach in nonlinear photonics,
enabling efficient parametric frequency conversions such as second-harmonic generation …

On-chip optical comb sources

A Hermans, K Van Gasse, B Kuyken - APL Photonics, 2022 - pubs.aip.org
On-chip integration of optical comb sources is crucial in enabling their widespread use.
Integrated photonic devices that can be mass-manufactured in semiconductor processing …

Low-loss high-Q silicon-rich silicon nitride microresonators for Kerr nonlinear optics

Z Ye, A Fülöp, ÓB Helgason, PA Andrekson… - Optics letters, 2019 - opg.optica.org
Silicon nitride is a dielectric material widely used for applications in linear and nonlinear
optics. It has an ultra-broad transparency window, low intrinsic loss, and a refractive index …

High-efficiency second-harmonic and sum-frequency generation in a silicon nitride microring integrated with few-layer GaSe

B Wang, Y Ji, L Gu, L Fang, X Gan, J Zhao - ACS Photonics, 2022 - ACS Publications
A silicon nitride (SiN) photonics platform has attributes of ultra-low linear and nonlinear
propagation losses and CMOS-compatible fabrication processes, promising large-scale …

Formation Rules and Dynamics of Photoinduced χ(2) Gratings in Silicon Nitride Waveguides

E Nitiss, T Liu, D Grassani, M Pfeiffer… - ACS …, 2019 - ACS Publications
Silicon nitride has emerged as a prominent platform for building photonics integrated
circuits. While its nonlinear properties based on third-order effects have been successfully …

Reversible and Tunable Second‐Order Nonlinear Optical Susceptibility in PZT Thin Films for Integrated Optics

GF Feutmba, A Hermans, JP George… - Advanced Optical …, 2021 - Wiley Online Library
Second‐order nonlinear optical processes enable a wide range of applications used in
research and industry. The majority of available second‐order nonlinear devices however …

Reconstruction of multidimensional nonlinear polarization response of Pancharatnam-Berry metasurfaces

Z Gao, P Genevet, G Li, KE Dorfman - Physical Review B, 2021 - APS
Pancharatnam-Berry (PB) metasurfaces have been considered as innovative optical devices
for efficient manipulation of both the phase and the polarization of the electromagnetic field …

Optically modified second harmonic generation in silicon oxynitride thin films via local layer heating

J Lukeš, V Kanclíř, J Václavík, R Melich, U Fuchs… - Scientific Reports, 2023 - nature.com
Strong second harmonic generation (SHG) in silicon nitride has been extensively studied—
among others, in terms of laser-induced SHG enhancement in Si3N4 waveguides. This …

[HTML][HTML] On the observation of dispersion in tunable second-order nonlinearities of silicon-rich nitride thin films

HH Lin, R Sharma, A Friedman, BM Cromey, F Vallini… - APL Photonics, 2019 - pubs.aip.org
We present experimental results on second-harmonic generation in non-stoichiometric,
silicon-rich nitride films. The as-deposited film presents a second-order nonlinear coefficient …