Semiconductor device and manufacturing method thereof

CS Li, HC Huang, CW Liu - US Patent 9,905,467, 2018 - Google Patents
(57) ABSTRACT A semiconductor device includes a substrate, a first insulat ing structure, a
second insulating structure, at least one first active semiconductor fin, and at least one …

Stacked transistors with different channel widths

K Cheng, LA Clevenger, BS Pranatharthiharan… - US Patent …, 2019 - Google Patents
A semiconductor device includes a first gate stack arranged about a first nanowire and a
second nanowire, the first nanowire is arranged above a second nanowire, the first …

Methods for fabricating integrated circuits using flowable chemical vapor deposition techniques with low-temperature thermal annealing

X Dou, S Hong, S Shinde, S Gaan, T Han… - US Patent …, 2017 - Google Patents
2014/0306317 Al 10/2014 Licausi 2014/0353795 Al 12/2014 Tong et al. 2017/0053798 Al*
2/2017 Wang................ HO1L 21/02348* cited by examiner Primary Examiner—John P Dulka …

FinFET having locally higher fin-to-fin pitch

G Hellings, R Boschke, D Linten… - US Patent 11,114,435, 2021 - Google Patents
The disclosed technology generally relates to semiconductor devices, and more particularly
to FinFET transistors. In one aspect, at least three fins are arranged to extend in parallel in a …

Semiconductor device and a method for fabricating the same

YD Chiou, C Janet, JYD Yeh - US Patent 10,134,872, 2018 - Google Patents
In a method of manufacturing a semiconductor device, a dummy gate structure is formed
over a substrate. A source/drain region is formed. A first insulating layer is formed over the …

FinFET having controlled dielectric region height

D Guo, Z Liu, T Yamashita, CC Yeh - US Patent 9,412,641, 2016 - Google Patents
BACKGROUND The present disclosure relates in general to semiconductor devices and
their manufacture, and more specifically to con trolling the height of a dielectric region of a …

Semiconductor device including active fin

S Kim, DH Cha, SS Paak - US Patent 10,199,499, 2019 - Google Patents
(57) ABSTRACT A semiconductor device includes first through fourth active fins, which
extend alongside one another in a first direction; and a field insulating film that covers lower …

Uniform dielectric recess depth during fin reveal

BD Briggs, LA Clevenger, M Rizzolo… - US Patent …, 2017 - Google Patents
(57) ABSTRACT A method for providing a uniform recess depth between different fin gap
sizes includes depositing a dielectric mate rial between fins on a Substrate. Etchlag is tuned …

Fin type field effect transistors with different pitches and substantially uniform fin reveal

Z Bi, K Cheng, TS Devarajan… - US Patent …, 2017 - Google Patents
(57) ABSTRACT A semiconductor device that includes a first plurality offin structures in a first
device region and a second plurality of fin structures in a second device region. The first …

Homogeneous densification of fill layers for controlled reveal of vertical fins

K Cheng, CH Lee, J Li, H Wu, P Xu - US Patent 10,410,928, 2019 - Google Patents
In accordance with an embodiment of the present invention, a method of forming a densified
fill layer is provided. The method includes forming a pair of adjacent vertical fins on a …