Piezoelectric thin films offer a number of advantages in various applications, such as high
energy density harvesters, a wide dynamic range, and high sensitivity sensors, as well as …

This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

Photonic miniaturization requires seamless integration of linear and nonlinear optical
components to achieve passive and active functions simultaneously. Among the available …

Advances in siliconcarbide microfabrication and growth process optimization for
siliconcarbide nanostructures are ushering in new opportunities for microdevices capable of …

The explosive development of wireless and mobile communication systems has
continuously driven rapid technology innovation in component performance and system …

Nano/micro mechanical resonators offer new prospects for a variety of important
applications including mass sensing,[1] biosensing,[2, 3] quantum mechanism,[4–6] digital …

The characteristics of one-port aluminum nitride (AlN) Lamb wave resonators utilizing the
lowest-order symmetric mode with electrically open, grounded, and floating bottom electrode …

A comprehensive spectroscopic study is reported for MOCVD (Metal organic chemical vapor
deposition) grown AlN thin films prepared on sapphire (Al 2 O 3) and 6H–SiC substrates …

The experimental demonstration of aluminum scandium nitride (AlScN)‐on‐cubic silicon
carbide (SiC) heterostructure thin film micromachined resonant transducers operating in a …

Single-crystalline silicon carbide (3C-SiC) on the Si substrate has drawn significant attention
in recent years due to its low wafer cost and excellent mechanical, chemical, and …